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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 51, Iss. 22 — Aug. 1, 2012
  • pp: 5567–5572

Method to test rotationally asymmetric surface deviation with high accuracy

Weihong Song, Fan Wu, and Xi Hou  »View Author Affiliations

Applied Optics, Vol. 51, Issue 22, pp. 5567-5572 (2012)

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We have proposed a new absolute method to test rotationally asymmetric surface deviation. Relying on the high accuracy of Zernike polynomial fitting with least-squares algorithm for the low-frequency component and preserving the high-frequency component with the averaging method, the new method can guarantee the high accuracy of the measurement result with fewer rotational measurements compared to the traditional multiangle averaging method. It realizes a balance between the accuracy and efficiency of the measurements. It has been verified by experiments; the root mean square (rms) of residual figure between the two methods is 0.6nm. Meanwhile, the new method can suppress environmental noise introduced in measurement results well.

© 2012 Optical Society of America

OCIS Codes
(120.2830) Instrumentation, measurement, and metrology : Height measurements
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4640) Instrumentation, measurement, and metrology : Optical instruments
(120.4800) Instrumentation, measurement, and metrology : Optical standards and testing
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: May 18, 2012
Revised Manuscript: June 18, 2012
Manuscript Accepted: July 7, 2012
Published: July 31, 2012

Weihong Song, Fan Wu, and Xi Hou, "Method to test rotationally asymmetric surface deviation with high accuracy," Appl. Opt. 51, 5567-5572 (2012)

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