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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 51, Iss. 25 — Sep. 1, 2012
  • pp: 5989–5995

Highly precise micro-retroreflector array fabricated by the LIGA process and its application as tapped delay line filter

Michael Bohling, Thomas Seiler, Boguslaw Wdowiak, Jürgen Jahns, Jürgen Mohr, and Martin Börner  »View Author Affiliations


Applied Optics, Vol. 51, Issue 25, pp. 5989-5995 (2012)
http://dx.doi.org/10.1364/AO.51.005989


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Abstract

We report on the fabrication of a one-dimensional micro-retroreflector array with a pitch of 100 μm. The array was fabricated by x-ray lithography and the lithographie, galvanik und abformung (LIGA) process in a 1 mm thick poly(methyl methacrylate) (PMMA) layer and subsequently covered with Au. The area of the array is 1mm×10mm. The high precision of the LIGA-based fabrication process allows one to use the element in spectrometers. Here, it is suggested to apply it to the implementation of a transversal filter for femtosecond pulses. We present a theoretical description of the performance of the retroreflector array as a filtering device and show experimental results.

© 2012 Optical Society of America

OCIS Codes
(050.0050) Diffraction and gratings : Diffraction and gratings
(230.3990) Optical devices : Micro-optical devices
(320.5540) Ultrafast optics : Pulse shaping

ToC Category:
Optical Devices

History
Original Manuscript: June 26, 2012
Manuscript Accepted: July 16, 2012
Published: August 23, 2012

Citation
Michael Bohling, Thomas Seiler, Boguslaw Wdowiak, Jürgen Jahns, Jürgen Mohr, and Martin Börner, "Highly precise micro-retroreflector array fabricated by the LIGA process and its application as tapped delay line filter," Appl. Opt. 51, 5989-5995 (2012)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-51-25-5989

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