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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 51, Iss. 31 — Nov. 1, 2012
  • pp: 7604–7615

Computational manufacturing as a key element in the design–production chain for modern multilayer coatings

Tatiana V. Amotchkina, Sebastian Schlichting, Henrik Ehlers, Michael K. Trubetskov, Alexander V. Tikhonravov, and Detlev Ristau  »View Author Affiliations


Applied Optics, Vol. 51, Issue 31, pp. 7604-7615 (2012)
http://dx.doi.org/10.1364/AO.51.007604


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Abstract

We propose a general approach that allows one to reveal factors causing production errors in the course of the deposition process controlled by broadband optical monitoring. We consider computational experiments simulating the real deposition process as a crucial point of this approach. We demonstrate application of the approach using multiple experimental deposition runs of the selected multilayer coatings.

© 2012 Optical Society of America

OCIS Codes
(310.1860) Thin films : Deposition and fabrication
(310.3840) Thin films : Materials and process characterization
(310.6860) Thin films : Thin films, optical properties
(310.4165) Thin films : Multilayer design

ToC Category:
Thin Films

History
Original Manuscript: July 5, 2012
Revised Manuscript: October 1, 2012
Manuscript Accepted: October 2, 2012
Published: October 26, 2012

Citation
Tatiana V. Amotchkina, Sebastian Schlichting, Henrik Ehlers, Michael K. Trubetskov, Alexander V. Tikhonravov, and Detlev Ristau, "Computational manufacturing as a key element in the design–production chain for modern multilayer coatings," Appl. Opt. 51, 7604-7615 (2012)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-51-31-7604


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References

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