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White-light interferometry on rough surfaces—measurement uncertainty caused by noise |
Applied Optics, Vol. 51, Issue 4, pp. 465-473 (2012)
http://dx.doi.org/10.1364/AO.51.000465
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Abstract
White-light interferometry on rough surfaces is an optical method for the measurement of the geometrical form of objects. The longitudinal coordinate of the measured surface is obtained from the measured interferogram by means of an evaluation method. However, the longitudinal coordinate cannot be determined completely accurately because the interferogram is affected by noise. We calculate the lower limit of the longitudinal measurement uncertainty caused by noise by use of the Cramer–Rao inequality. Additionally, we calculate the lower limit of the longitudinal measurement uncertainty caused by shot noise only.
© 2012 Optical Society of America
OCIS Codes
(030.4280) Coherence and statistical optics : Noise in imaging systems
(100.2000) Image processing : Digital image processing
(120.3180) Instrumentation, measurement, and metrology : Interferometry
ToC Category:
Image Processing
History
Original Manuscript: August 11, 2011
Revised Manuscript: November 10, 2011
Manuscript Accepted: November 10, 2011
Published: January 26, 2012
Citation
Pavel Pavliček and Ondřej Hýbl, "White-light interferometry on rough surfaces—measurement uncertainty caused by noise," Appl. Opt. 51, 465-473 (2012)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-51-4-465
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