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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 51, Iss. 8 — Mar. 10, 2012
  • pp: 1095–1100

Measurement of in-plane displacement by wavelength-modulated heterodyne speckle interferometry

Ju-Yi Lee, Ming-Pei Lu, Kun-Yi Lin, and Szu-Han Huang  »View Author Affiliations

Applied Optics, Vol. 51, Issue 8, pp. 1095-1100 (2012)

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The use of wavelength-modulated light incorporated into an optical-path-difference speckle interferometer is demonstrated as a heterodyne technique for measuring the in-plane displacement of a rough object. The in-plane displacement can be determined from the measured phase variation of the heterodyne speckle signal. We also improved the optical configuration to create a high-contrast interference pattern. Experimental results reveal that the proposed method can detect displacement up to a long range of 220 μm and displacement variation down to the nanometer range. Moreover, the sensitivity can reach up to 0.8 ° / nm . The performance of the system is discussed.

© 2012 Optical Society of America

OCIS Codes
(040.2840) Detectors : Heterodyne
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.6160) Instrumentation, measurement, and metrology : Speckle interferometry
(140.3518) Lasers and laser optics : Lasers, frequency modulated
(120.6165) Instrumentation, measurement, and metrology : Speckle interferometry, metrology

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: November 3, 2011
Revised Manuscript: January 3, 2012
Manuscript Accepted: January 4, 2012
Published: March 6, 2012

Ju-Yi Lee, Ming-Pei Lu, Kun-Yi Lin, and Szu-Han Huang, "Measurement of in-plane displacement by wavelength-modulated heterodyne speckle interferometry," Appl. Opt. 51, 1095-1100 (2012)

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