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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 51, Iss. 8 — Mar. 10, 2012
  • pp: 1122–1130

Semiellipsoid microlens fabrication method using UV proximity printing

Chien-Hsin Hung, Shih-Yu Hung, Ming-Ho Shen, and Hsiharng Yang  »View Author Affiliations

Applied Optics, Vol. 51, Issue 8, pp. 1122-1130 (2012)

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We present a new semiellipsoid microlens fabrication method that controls the printing gap in the UV lithography process without thermal reflow. The UV proximity printing method can precisely control the curvature radius ratio of the semiellipsoid microlens in the fabrication process. The proposed fabrication method facilitates mass production to achieve a high-yield and high-coupling semiellipsoid microlens that is suitable to be used in commercial fiber transmission systems. A semiellipsoid microlens can be tipped on a single-mode fiber end to improve power coupling efficiency from laser diodes. The semiellipsoid microlens allows increasing the fiber spot size and numerical aperture. It is very important to control the geometric parameters in the assembly procedure to increase the optical coupling efficiency between the laser diode and single-mode fiber. Wide misalignment tolerance, low loss, and low manufacturing cost could be achieved by the proposed fabrication method. The theoretical model is first developed to predict the optical coupling efficiency for various microstructure geometries of semiellipsoid microlens and assembly parameters in this study. Then, the Taguchi method is applied to obtain the optimal geometric parameters setting. The results show that optical coupling efficiency could be significantly improved by using the optimal geometric parameters setting.

© 2012 Optical Society of America

OCIS Codes
(060.2310) Fiber optics and optical communications : Fiber optics
(060.2330) Fiber optics and optical communications : Fiber optics communications
(060.2340) Fiber optics and optical communications : Fiber optics components
(060.2370) Fiber optics and optical communications : Fiber optics sensors
(140.3325) Lasers and laser optics : Laser coupling

ToC Category:
Optical Design and Fabrication

Original Manuscript: August 26, 2011
Revised Manuscript: November 21, 2011
Manuscript Accepted: November 29, 2011
Published: March 8, 2012

Chien-Hsin Hung, Shih-Yu Hung, Ming-Ho Shen, and Hsiharng Yang, "Semiellipsoid microlens fabrication method using UV proximity printing," Appl. Opt. 51, 1122-1130 (2012)

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