Three-dimensional measuring technique for surface topography using a light-sectioning microscope

Linglin Xia; Peifeng Chen; Ying Wang; Le Zhou; Xi Luo

doi:10.1364/AO.51.001162

Applied Optics
Vol. 51,
Issue 8,
pp. 1162-1170
(2012)
•https://doi.org/10.1364/AO.51.001162

Three-dimensional measuring technique for surface topography using a light-sectioning microscope

Linglin Xia, Peifeng Chen, Ying Wang, Le Zhou, and Xi Luo

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Linglin Xia, Peifeng Chen, Ying Wang, Le Zhou, and Xi Luo, "Three-dimensional measuring technique for surface topography using a light-sectioning microscope," Appl. Opt. 51, 1162-1170 (2012)

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Table of Contents Category
- Instrumentation, Measurement, and Metrology
Optics & Photonics Topics
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The topics in this list come from the Optics and Photonics Topics applied to this article.

About this Article
History
- Original Manuscript: September 28, 2011
- Revised Manuscript: December 13, 2011
- Manuscript Accepted: December 13, 2011
- Published: March 8, 2012
Virtual Issues
Virtual Journal for Biomedical Optics Vol. 7, Iss. 5

Abstract

Three-dimensional (3D) surface topographic analysis, measurement, and assessment techniques have raised great interest not only among researchers but also among industrial users. Many industrial processes and applications are directly influenced by the small-scale roughness of surface finishes. This paper describes the development and implementation of a noncontact, three-dimensional, microtopography measuring system. The instrument is formed by combining a modified light-sectioning microscope subsystem with a computer subsystem. In particular, optical system characteristics of the light-sectioning microscope are investigated, and a textured steel sheet is measured to demonstrate good practical outcomes. Details of measuring processes and image processing algorithms are provided, such as procedures for measurement, image edge extraction, and 3D topography reconstruction. After the 3D topography of the measured surface has been reconstructed, the topography field description parameters are calculated. A standard roughness block was used for calibration of the surface microtopography measuring system. Results obtained showed the measurement method output has good agreement with the actual asperity (unevenness or roughness) of the surface. The computer subsystem is used to process and control asperity measurements and image generation, and for image acquisition and presentation.

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Type	Parameters	Results 1	Results 2	Results 3
Average of ordinates	$S_{q} (μm)$	2.59	2.60	2.50
	$S_{sk}$	1.36	1.35	1.40
	$S_{ku}$	2.22	2.18	2.37
Peak and valley	$S_{p} (μm)$	5.05	5.11	5.13
	$S_{v} (μm)$	$- 2.02$	$- 2.36$	$- 2.20$
	$S_{z} (μm)$	7.07	7.47	7.33
Roughness	$R_{a} (μm)$	2.01	2.04	1.98
Roughness	$R_{z} (μm)$	7.07	7.47	7.33

$S$ -Parameters Set		$S$ , $V$ -Parameters Set
$S_{a} (μm)$	1.506	$S_{k} (μm)$	1.7
$S_{ds} (1 / {mm}^{2})$	96	$S_{pk} (μm)$	4.18
$S_{al} (mm)$	0.77	$S_{vk} (μm)$	1.19
$S_{tr}$	0.141	$S_{mr 1} (%)$	17.7
$S_{sc} (1 / μm)$	$- 0.150$	$S_{mr 2} (%)$	91.3
$S_{dq} (μm / μm)$	0.387	$V_{mp} ({μm}^{3} / {mm}^{2})$	$4.741 E + 5$
$S_{dr} (%)$	6.548	$V_{mp} ({μm}^{3} / {mm}^{2})$	$1.676 E + 6$
$S_{td} (rad)$	$- 0.494$	$V_{vc} ({μm}^{3} / {mm}^{2})$	$3.362 E + 6$
$S_{5 z} (μm)$	7.053	$V_{vv} ({μm}^{3} / {mm}^{2})$	$4.537 E + 6$

Type	Parameters name	Results 1	Results 2	Results 3	Simulation Surface
Average of ordinates	$S_{q} (μm)$	6.036	5.651	6.300	6.856
	$S_{sk}$	1.303	1.297	1.309	1.319
	$S_{ku}$	1.741	1.739	1.742	1.746
Peak and valley	$S_{p} (μm)$	5.0	5.0	5.2	5.0
Peak and valley	$S_{v} (μm)$	$- 5.0$	$- 4.5$	$- 5.0$	$- 5.0$
Roughness	$S_{z} (μm)$	10.0	9.5	10.2	10.0
	$R_{a} (μm)$	3.00	2.93	2.99	3.14
	$R_{z} (μm)$	10.0	9.5	10.2	10.0

Type	Parameters	Results 1	Results 2	Results 3
Average of ordinates	$S_{q} (μm)$	2.59	2.60	2.50
	$S_{sk}$	1.36	1.35	1.40
	$S_{ku}$	2.22	2.18	2.37
Peak and valley	$S_{p} (μm)$	5.05	5.11	5.13
	$S_{v} (μm)$	$- 2.02$	$- 2.36$	$- 2.20$
	$S_{z} (μm)$	7.07	7.47	7.33
Roughness	$R_{a} (μm)$	2.01	2.04	1.98
Roughness	$R_{z} (μm)$	7.07	7.47	7.33

$S$ -Parameters Set		$S$ , $V$ -Parameters Set
$S_{a} (μm)$	1.506	$S_{k} (μm)$	1.7
$S_{ds} (1 / {mm}^{2})$	96	$S_{pk} (μm)$	4.18
$S_{al} (mm)$	0.77	$S_{vk} (μm)$	1.19
$S_{tr}$	0.141	$S_{mr 1} (%)$	17.7
$S_{sc} (1 / μm)$	$- 0.150$	$S_{mr 2} (%)$	91.3
$S_{dq} (μm / μm)$	0.387	$V_{mp} ({μm}^{3} / {mm}^{2})$	$4.741 E + 5$
$S_{dr} (%)$	6.548	$V_{mp} ({μm}^{3} / {mm}^{2})$	$1.676 E + 6$
$S_{td} (rad)$	$- 0.494$	$V_{vc} ({μm}^{3} / {mm}^{2})$	$3.362 E + 6$
$S_{5 z} (μm)$	7.053	$V_{vv} ({μm}^{3} / {mm}^{2})$	$4.537 E + 6$

Abstract

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Equations (9)

Applied Optics