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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 51, Iss. 9 — Mar. 20, 2012
  • pp: 1352–1356

Opaque optics thickness measurement using a cyclic path optical configuration setup and polarization phase shifting interferometry

Y. Pavan Kumar and Sanjib Chatterjee  »View Author Affiliations

Applied Optics, Vol. 51, Issue 9, pp. 1352-1356 (2012)

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Thickness measurement of an opaque optics using a cyclic path optical configuration (CPOC) setup and polarization phase shifting interferometry (PPSI) is presented. The CPOC setup is used to simultaneously focus two orthogonally polarized counterpropagating converging beams at its hypotenuse arm. The opaque optics is placed at the hypotenuse arm of the CPOC setup such that one of its surfaces reflects back one of the counterpropagating focusing beams. Because of the thickness of the opaque optics, the other focusing beam suffers a longitudinal shift in the beam focus. Applying PPSI, the longitudinal shift in the beam focus which is twice the thickness of the opaque optics is determined. The results obtained for a silicon plate of thickness 0.660 mm with a measurement uncertainty of 0.013 mm are presented.

© 2012 Optical Society of America

OCIS Codes
(120.1680) Instrumentation, measurement, and metrology : Collimation
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4290) Instrumentation, measurement, and metrology : Nondestructive testing
(260.5430) Physical optics : Polarization

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: September 8, 2011
Revised Manuscript: November 15, 2011
Manuscript Accepted: November 23, 2011
Published: March 15, 2012

Y. Pavan Kumar and Sanjib Chatterjee, "Opaque optics thickness measurement using a cyclic path optical configuration setup and polarization phase shifting interferometry," Appl. Opt. 51, 1352-1356 (2012)

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  1. D. Malacara, Optical Shop Testing (Wiley, 2007).
  2. E. N. Morel and J. R. Torga, “Dimensional characterization of opaque samples with a ring interferometer,” Opt. Lasers Eng. 47, 607–611 (2009). [CrossRef]
  3. S. H. Lu, C. I. Chiueh, and C. C. Lee, “Measuring thickness of opaque plane-parallel parts using external cavity diode laser and a double-ended interferometer,” Opt. Commun. 226, 7–13 (2003). [CrossRef]
  4. D. H. Kim, C. G. Song, K. Ilev, and J. U. Kang, “Axial-scanning low-coherence interferometer method for noncontact thickness measurement of biological samples,” Appl. Opt. 50, 970–974 (2011). [CrossRef]
  5. M. W. Grindel, “Testing collimation using shearing interferometry,” Proc. SPIE 680, 44–47 (1986).
  6. M. P. Kothyial, R. S. Sirohi, and K. J. Rosenbruch, “Improved techniques of collimation testing,” Opt. Lasers Technol. 20, 139–144 (1988). [CrossRef]
  7. S. Chatterjee, Y. Pawan Kumar, and B. Bhaduri, “Measurement of surface figure of plane optical surfaces with polarization phase-shifting interferometer,” Opt. Lasers Technol. 39, 268–274 (2007). [CrossRef]
  8. P. Hariharan, B. F. Oreb, and T. Eiju, “Digital phase-shifting interferometry: a simple error-compensating phase calculation algorithm,” Appl. Opt. 26, 2504–2506 (1987). [CrossRef]
  9. Y. Pavan Kumar and S. Chatterjee, “Measurement of longitudinal displacement using lateral shearing cyclic path optical configuration setup and phase shifting interferometry,” Appl. Opt. 50, 1350–1355 (2011). [CrossRef]
  10. K. Creath, “Phase measurement interferometry techniques,” in Progress in Optics, Vol. 26, E. Wolf, ed. (Elsevier, 1998), pp. 349–393.
  11. S. Chatterjee and Y. Pawan Kumar, “Simple technique for the generation of white light Young’s fringes with a cyclic path optical configuration,” Appl. Opt. 47, 2956–2960 (2008). [CrossRef]
  12. Y. Pavan Kumar and S. Chatterjee, “Technique for the focal-length measurement of positive lenses using Fizeau interferometry,” Appl. Opt. 48, 730–736 (2009). [CrossRef]
  13. R. S. Sirohi, “Interference of light,” in Wave Optics and Its Applications (Orient Longman, 2001), pp. 164–165.

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