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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 52, Iss. 24 — Aug. 20, 2013
  • pp: 5974–5978

Simple and rapid data-reduction method with pixel-level spatial frequency of shift-rotation method

W. Song, X. Hou, F. Wu, and Y. Wan  »View Author Affiliations

Applied Optics, Vol. 52, Issue 24, pp. 5974-5978 (2013)

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Absolute testing methods are commonly employed in surface metrology to calibrate the reference surface deviation and obtain the absolute deviation of the surface under test. A simple and reliable data-reduction method of absolute shift-rotation method with rotational and translational measurements is presented here, which relies on the decomposition of the surface deviation into rotationally asymmetric and symmetric components. The rotationally asymmetric surface deviation can be simply obtained by classical N-position averaging method. After that, the two-dimensional problem of estimating the other rotationally symmetric surface deviation can be simplified to a one-dimensional problem, and it can be directly calculated out with pixel-level spatial frequency based on several measurements of different translations in one same direction. Since that no orthogonal polynomials fitting, such as Zernike polynomials, is required in the calculation, the data reduction of the method is simple and rapid. Experimental absolute results of spherical surfaces are given.

© 2013 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4800) Instrumentation, measurement, and metrology : Optical standards and testing
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: June 6, 2013
Revised Manuscript: July 21, 2013
Manuscript Accepted: July 21, 2013
Published: August 15, 2013

W. Song, X. Hou, F. Wu, and Y. Wan, "Simple and rapid data-reduction method with pixel-level spatial frequency of shift-rotation method," Appl. Opt. 52, 5974-5978 (2013)

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