OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 52, Iss. 24 — Aug. 20, 2013
  • pp: 5979–5984

Laser beam diffraction at the edge of a film and application to thin film metrology

P. A. Do, M. Touaibia, and A. Haché  »View Author Affiliations


Applied Optics, Vol. 52, Issue 24, pp. 5979-5984 (2013)
http://dx.doi.org/10.1364/AO.52.005979


View Full Text Article

Enhanced HTML    Acrobat PDF (941 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

The thickness change of a film is measured optically using self-interference of a single laser beam incident at the edge of the film. Theory suggests that when a half-plane phase shift is applied to a Gaussian laser beam, interference fringes appear in the near and far field, in which position varies with the amount of phase shift. By measuring fringe pattern displacement, we demonstrate detection of thickness changes in chitosan films induced by temperature rises of a few degrees centigrade. With a laser at 543 nm, the minimum detectable thickness change is 0.8 nm in ideal conditions (quarter wave films), corresponding with a phase shift of 0.02 rad, and the minimum detectable film thickness is 30nm. Potential use for surface temperature measurements is discussed.

© 2013 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(240.0240) Optics at surfaces : Optics at surfaces
(240.0310) Optics at surfaces : Thin films
(310.6870) Thin films : Thin films, other properties

ToC Category:
Optics at Surfaces

History
Original Manuscript: May 28, 2013
Revised Manuscript: July 19, 2013
Manuscript Accepted: July 24, 2013
Published: August 15, 2013

Citation
P. A. Do, M. Touaibia, and A. Haché, "Laser beam diffraction at the edge of a film and application to thin film metrology," Appl. Opt. 52, 5979-5984 (2013)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-52-24-5979


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. N. J. Harrick, “Determination of refractive index and film thickness from interference fringes,” Appl. Opt. 10, 2344–2349 (1971). [CrossRef]
  2. Y. Laaziz, A. Bennoun, N. Chahboun, A. Outzourhit, and E. L. Ameziane, “Optical characterization of low optical thickness thin films from transmittance and back reflectance measurements,” Thin Solid Films 372, 149–155 (2000). [CrossRef]
  3. O. Köysal, D. Önal, S. Özder, and F. Necati Ecevit, “Thickness measurement of dielectric films by wavelength scanning method,” Opt. Commun. 205, 1–6 (2002). [CrossRef]
  4. C. D. Zuiker, D. M. Gruen, and A. R. Krauss, “In situ laser reflectance interferometry measurement of diamond film growth” J. Appl. Phys. 79, 3541–3547 (1996). [CrossRef]
  5. V. V. Kotlyar, A. Almazov, Svetlana N. Khonina, V. A. Soifer, H. Elfstrom, and J. Turunen, “Generation of phase singularity through diffracting a plane or Gaussian beam by a spiral phase plate,” J. Opt. Soc. Am. A 22, 849–861 (2005). [CrossRef]
  6. S. Anokhov, A. Khizhnyak, and R. Lymarenko, “Diffraction of optical beams by a half-plane,” Semicond. Phys. Quantum Electron. Optoelectron. 3, 94–101 (2000).
  7. M. Katsav and E. Heyman, “Gaussian beam summation representation of a two-dimensional Gaussian beam diffraction by an half plane,” IEEE Trans. Antennas Propag. AP-55, 2247–2257 (2007). [CrossRef]
  8. A. C. Green, H. L. Bertoni, and L. B. Felsen, “Properties of the shadow cast by a half-screen when illuminated by a Gaussian beam,” J. Opt. Soc. Am. 69, 1503–1508 (1979). [CrossRef]
  9. P. Hillion, “Diffraction of a Gaussian beam at a perfectly conducting half-screen,” J. Opt. 26, 57–64 (1995). [CrossRef]
  10. T. Takenaka and O. Fukumitsu, “Asymptotic representation of the boundary-diffraction wave for a three-dimensional Gaussian beam incident upon a Kirchhoff half-screen,” J. Opt. Soc. Am. 72, 331–336 (1982). [CrossRef]
  11. A. Khizhnyak, S. P. Anokhov, R. A. Lymarenko, M. S. Soskin, and M. V. Vasnetsov, “Structure of an edge-dislocation wave originating in plane-wave diffraction by a half-plane,” J. Opt. Soc. Am. A 17, 2199–2207 (2000). [CrossRef]
  12. J. W. Goodman, Introduction to Fourier Optics, 3rd ed. (Roberts and Company Publishers, 2004).
  13. B. A. Saleh and C. Teich, Fundamentals of Photonics (Wiley-Interscience, 1991).
  14. Z. Montiel-González, G. Luna-Bárcenas, and A. Mendoza-Galván, “Thermal behaviour of chitosan and chitin thin films studied by spectroscopic ellipsometry,” Phys. Status Solidi 5, 1434–1437 (2008). [CrossRef]
  15. F. S. Ligler, B. M. Lingerfelt, R. P. Price, and P. E. Schoen, “Development of uniform chitosan thin-film layers on silicon chips,” Langmuir 17, 5082–5084 (2001). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited