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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 52, Iss. 28 — Oct. 1, 2013
  • pp: 7007–7010

HyDRa: polishing process convergence rate optimization

Luis Salas, Esteban Luna, Erika Sohn, Elfego Ruiz, and Joel Herrera  »View Author Affiliations


Applied Optics, Vol. 52, Issue 28, pp. 7007-7010 (2013)
http://dx.doi.org/10.1364/AO.52.007007


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Abstract

In an effort to optimize the hydrodynamic radial (HyDRa) polishing process for applications where the amount of material that has to be removed implies long polishing times, we have developed a method to determine the optimum correction fraction that has to be made for a given error map, in terms of the level of determinism of the process, the number of iterations, and their associated polishing runs as well as run times.

© 2013 Optical Society of America

OCIS Codes
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.5450) Optical design and fabrication : Polishing

ToC Category:
Optical Design and Fabrication

History
Original Manuscript: July 29, 2013
Manuscript Accepted: August 31, 2013
Published: September 30, 2013

Citation
Luis Salas, Esteban Luna, Erika Sohn, Elfego Ruiz, and Joel Herrera, "HyDRa: polishing process convergence rate optimization," Appl. Opt. 52, 7007-7010 (2013)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-52-28-7007

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