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Laser focus positioning method with submicrometer accuracy |
Applied Optics, Vol. 52, Issue 3, pp. 415-421 (2013)
http://dx.doi.org/10.1364/AO.52.000415
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Abstract
Accurate positioning of a sample is one of the primary challenges in laser micromanufacturing. There are a number of methods that allow detection of the surface position; however, only a few of them use the beam of the processing laser as a basis for the measurement. Those methods have an advantage that any changes in the processing laser beam can be inherently accommodated. This work describes a direct, contact-free method to accurately determine workpiece position with respect to the structuring laser beam focal plane based on nonlinear harmonic generation. The method makes workpiece alignment precise and time efficient due to ease of automation and provides the repeatability and accuracy of the surface detection of less than 1 μm.
© 2013 Optical Society of America
OCIS Codes
(120.2830) Instrumentation, measurement, and metrology : Height measurements
(190.1900) Nonlinear optics : Diagnostic applications of nonlinear optics
(190.4350) Nonlinear optics : Nonlinear optics at surfaces
(320.0320) Ultrafast optics : Ultrafast optics
ToC Category:
Ultrafast Optics
History
Original Manuscript: September 14, 2012
Revised Manuscript: November 21, 2012
Manuscript Accepted: December 10, 2012
Published: January 16, 2013
Citation
Ilya Alexeev, Johannes Strauss, Andreas Gröschl, Kristian Cvecek, and Michael Schmidt, "Laser focus positioning method with submicrometer accuracy," Appl. Opt. 52, 415-421 (2013)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-52-3-415
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