Correction of remounting errors by masking reference points in small footprint polishing process

Tan Wang; Haobo Cheng; Yong Chen; Yunpeng Feng; Zhichao Dong; Honyuen Tam

doi:10.1364/AO.52.007851

Applied Optics
Vol. 52,
Issue 33,
pp. 7851-7858
(2013)
•https://doi.org/10.1364/AO.52.007851

Correction of remounting errors by masking reference points in small footprint polishing process

Tan Wang, Haobo Cheng, Yong Chen, Yunpeng Feng, Zhichao Dong, and Honyuen Tam

Not Accessible

Your library or personal account may give you access

Get PDF
Email
Share
Get Citation
Copy Citation Text
Tan Wang, Haobo Cheng, Yong Chen, Yunpeng Feng, Zhichao Dong, and Honyuen Tam, "Correction of remounting errors by masking reference points in small footprint polishing process," Appl. Opt. 52, 7851-7858 (2013)

Export Citation
- BibTex
- Endnote (RIS)
- HTML
- Plain Text
Citation alert
Save article

Abstract

The remounting accuracy of optical components between measurement and polishing affects the polishing results, especially for small polishing footprint processes such as magnetorheological jet polishing (MJP). In this paper, two important remounting errors (translation and rotation errors) are discussed, and a masking method is proposed to correct these errors. A mathematical model that describes the relationship between remounting errors and reference points is constructed. A mask is created to provide reference points on a sample because such points are important for identifying remounting errors. The remounting errors are then used as bases in correcting the parameters used for actual polishing. Experiments are conducted on a K9 optical sample to validate the proposed approach. After the reference points are obtained by measuring the mask on the sample, the remounting errors are derived. The translation errors are 5.61 mm in the $X$ direction and 6.08 mm in the $Y$ direction; the rotation error is 4.1°. Deviations from the desired positions are eliminated and the desired surface smoothness is obtained after parameter correction. Results indicate that the proposed method is suitable for high-precision polishing.

Full Article | PDF Article

More Like This

Controlling mid-spatial frequency errors in magnetorheological jet polishing with a simple vertical model

Tan Wang, Haobo Cheng, Hao Yang, Wentao Wu, and Honyuen Tam
Appl. Opt. 54(21) 6433-6440 (2015)

Removal of millimeter-scale rolled edges using bevel-cut-like tool influence function in magnetorheological jet polishing

Hao Yang, Haobo Cheng, Yunpeng Feng, and Xiaoli Jing
Appl. Opt. 57(13) 3377-3384 (2018)

Experimental investigation of flow-focusing-assisted magnetorheological jet polishing

Qiang Liu, Zhiwei Dong, Zhen Chen, Yang Shen, Qiang Li, and Peng An
Appl. Opt. 61(21) 6366-6373 (2022)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (9)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (2)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (12)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

$l_{1}$ (mm)		$l_{2}$ (mm)		$l_{3}$ (mm)		$l_{4}$ (mm)
$x_{p 1}$	$y p_{1}$	$x p_{2}$	$y p_{2}$	$x p_{3}$	$y p_{3}$	$x p_{4}$	$y p_{4}$
$- 10.63$	15.67	14.679	$- 9$	$- 10.63$	$- 13.945$	$- 14.524$	$- 9$
$- 7.63$	15.544	14.839	$- 6$	$- 7.63$	$- 14.151$	$- 14.398$	$- 6$
$- 4.63$	15.251	15.021	$- 3$	$- 4.63$	$- 14.397$	$- 14.273$	$- 3$
$- 1.63$	15.035	15.171	0	$- 1.63$	$- 14.603$	$- 13.121$	0
1.37	14.86	15.401	3	1.37	$- 14.840$	$- 13.98$	3
4.37	14.656	15.519	6	4.37	$- 15.065$	$- 13.848$	6
7.37	14.463	15.656	9	7.37	$- 15.292$	$- 13.701$	9
10.37	14.274	15.803	12	10.37	$- 15.516$	$- 13.536$	12
13.37	14.077			13.37	$- 15.743$

Parameter	Value
Mass fraction of ${CeO}_{2}$ particles in fluid (%)	3
Diameter of ${CeO}_{2}$ particle (μm)	2
Diameter of nozzle (mm)	0.95
Pressure (MPa)	0.6
stand-off distance (mm)	50

$l_{1}$ (mm)		$l_{2}$ (mm)		$l_{3}$ (mm)		$l_{4}$ (mm)
$x_{p 1}$	$y p_{1}$	$x p_{2}$	$y p_{2}$	$x p_{3}$	$y p_{3}$	$x p_{4}$	$y p_{4}$
$- 10.63$	15.67	14.679	$- 9$	$- 10.63$	$- 13.945$	$- 14.524$	$- 9$
$- 7.63$	15.544	14.839	$- 6$	$- 7.63$	$- 14.151$	$- 14.398$	$- 6$
$- 4.63$	15.251	15.021	$- 3$	$- 4.63$	$- 14.397$	$- 14.273$	$- 3$
$- 1.63$	15.035	15.171	0	$- 1.63$	$- 14.603$	$- 13.121$	0
1.37	14.86	15.401	3	1.37	$- 14.840$	$- 13.98$	3
4.37	14.656	15.519	6	4.37	$- 15.065$	$- 13.848$	6
7.37	14.463	15.656	9	7.37	$- 15.292$	$- 13.701$	9
10.37	14.274	15.803	12	10.37	$- 15.516$	$- 13.536$	12
13.37	14.077			13.37	$- 15.743$

Parameter	Value
Mass fraction of ${CeO}_{2}$ particles in fluid (%)	3
Diameter of ${CeO}_{2}$ particle (μm)	2
Diameter of nozzle (mm)	0.95
Pressure (MPa)	0.6
stand-off distance (mm)	50

Abstract

Cited By

Figures (9)

Tables (2)

Equations (12)

Applied Optics