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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 52, Iss. 36 — Dec. 20, 2013
  • pp: 8644–8649

Sub-sampling low coherence scanning interferometry and its application: refractive index measurements of a silicon wafer

Ki-Nam Joo  »View Author Affiliations


Applied Optics, Vol. 52, Issue 36, pp. 8644-8649 (2013)
http://dx.doi.org/10.1364/AO.52.008644


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Abstract

In this investigation, refractive indices of a silicon (Si) wafer were measured by low-coherence scanning interferometry adopting the sub-sampling technique to reduce measurement time. Based on Fourier domain analysis method, the sub-sampled correlogram was analyzed and the refractive indices were calculated by the simple refractive index model and curve fitting of the phase extracted from the sub-sampled correlogram. In the experiment to verify the proposed technique, near-infrared light emitted by a super-luminescent diode with 1050 nm center wavelength was used as an optical source because it is partially transparent to an undoped Si wafer. As the result of measuring an undoped double-side polished Si wafer, group and phase refractive indices were successfully obtained with the sub-sampled correlogram, and the deviations from the reference value were within 0.001.

© 2013 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4640) Instrumentation, measurement, and metrology : Optical instruments
(120.4825) Instrumentation, measurement, and metrology : Optical time domain reflectometry

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: September 12, 2013
Revised Manuscript: November 3, 2013
Manuscript Accepted: November 18, 2013
Published: December 11, 2013

Citation
Ki-Nam Joo, "Sub-sampling low coherence scanning interferometry and its application: refractive index measurements of a silicon wafer," Appl. Opt. 52, 8644-8649 (2013)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-52-36-8644


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