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Influence of tilt on collinear calibration of a laser interferometer |
Applied Optics, Vol. 52, Issue 4, pp. B46-B51 (2013)
http://dx.doi.org/10.1364/AO.52.000B46
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Abstract
Collinear calibration is a typical and common method for a laser (heterodyne) interferometer, but it usually suffers from the influence of the tilt of the target retroreflectors and the dissymmetry of the optical paths during the calibration. This paper mainly analyzes and models the calibration error caused by the tilt error of the target retroreflectors and reveals the error source that is the disturbance from the rotary error of the guideway slider pair. Experimental results prove the validity of the analysis and model of the calibration error. The calibration error is up to 0.5 μm when the tilt error is 0.36°, which is large enough to equal the maximum tolerance of laser interferometer (0.5 μm) in use.
© 2013 Optical Society of America
OCIS Codes
(080.2720) Geometric optics : Mathematical methods (general)
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.4640) Instrumentation, measurement, and metrology : Optical instruments
History
Original Manuscript: August 23, 2012
Revised Manuscript: November 26, 2012
Manuscript Accepted: December 17, 2012
Published: January 16, 2013
Citation
Shanzhi Tang, Zhao Wang, Jianmin Gao, and Lihong Zhong, "Influence of tilt on collinear calibration of a laser interferometer," Appl. Opt. 52, B46-B51 (2013)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-52-4-B46
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