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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 53, Iss. 10 — Apr. 1, 2014
  • pp: 2126–2135

Thermal stability studies of short period Sc/Cr and Sc/B4C/Cr multilayers

Mauro Prasciolu, Adam F. G. Leontowich, Kenneth R. Beyerlein, and Saša Bajt  »View Author Affiliations


Applied Optics, Vol. 53, Issue 10, pp. 2126-2135 (2014)
http://dx.doi.org/10.1364/AO.53.002126


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Abstract

The stability of short period Sc/Cr and Sc/B4C/Cr multilayers was investigated over a large temperature range. The aim was to find a stable reflective coating for an off-axis parabola for focusing x rays from a soft x-ray free-electron laser. Normal incidence reflectivity, surface roughness, and intrinsic stress were investigated as a function of annealing temperature and two samples were also studied with a high-resolution transmission electron microscope (TEM), a scanning TEM, and through electron energy loss spectroscopy (EELS). Interface-engineered Sc/B4C/Cr multilayers showed increased thermal stability and higher reflectivity as compared to pure Sc/Cr multilayers.

© 2014 Optical Society of America

OCIS Codes
(140.2600) Lasers and laser optics : Free-electron lasers (FELs)
(230.4170) Optical devices : Multilayers
(310.0310) Thin films : Thin films
(310.1860) Thin films : Deposition and fabrication
(340.0340) X-ray optics : X-ray optics

ToC Category:
X-ray Optics

History
Original Manuscript: December 18, 2013
Revised Manuscript: February 14, 2014
Manuscript Accepted: February 21, 2014
Published: March 28, 2014

Citation
Mauro Prasciolu, Adam F. G. Leontowich, Kenneth R. Beyerlein, and Saša Bajt, "Thermal stability studies of short period Sc/Cr and Sc/B4C/Cr multilayers," Appl. Opt. 53, 2126-2135 (2014)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-53-10-2126

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