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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 53, Iss. 10 — Apr. 1, 2014
  • pp: 2126–2135

Thermal stability studies of short period Sc/Cr and Sc/B4C/Cr multilayers

Mauro Prasciolu, Adam F. G. Leontowich, Kenneth R. Beyerlein, and Saša Bajt  »View Author Affiliations


Applied Optics, Vol. 53, Issue 10, pp. 2126-2135 (2014)
http://dx.doi.org/10.1364/AO.53.002126


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Abstract

The stability of short period Sc/Cr and Sc/B4C/Cr multilayers was investigated over a large temperature range. The aim was to find a stable reflective coating for an off-axis parabola for focusing x rays from a soft x-ray free-electron laser. Normal incidence reflectivity, surface roughness, and intrinsic stress were investigated as a function of annealing temperature and two samples were also studied with a high-resolution transmission electron microscope (TEM), a scanning TEM, and through electron energy loss spectroscopy (EELS). Interface-engineered Sc/B4C/Cr multilayers showed increased thermal stability and higher reflectivity as compared to pure Sc/Cr multilayers.

© 2014 Optical Society of America

OCIS Codes
(140.2600) Lasers and laser optics : Free-electron lasers (FELs)
(230.4170) Optical devices : Multilayers
(310.0310) Thin films : Thin films
(310.1860) Thin films : Deposition and fabrication
(340.0340) X-ray optics : X-ray optics

ToC Category:
X-ray Optics

History
Original Manuscript: December 18, 2013
Revised Manuscript: February 14, 2014
Manuscript Accepted: February 21, 2014
Published: March 28, 2014

Citation
Mauro Prasciolu, Adam F. G. Leontowich, Kenneth R. Beyerlein, and Saša Bajt, "Thermal stability studies of short period Sc/Cr and Sc/B4C/Cr multilayers," Appl. Opt. 53, 2126-2135 (2014)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-53-10-2126


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References

  1. E. Spiller, “Low-loss reflection coatings using absorbing materials,” Appl. Phys. Lett. 20, 365–367 (1972). [CrossRef]
  2. S. Bajt, J. Alameda, T. Barbee, W. M. Clift, J. A. Folta, B. Kaufmann, and E. Spiller, “Improved reflectance and stability of Mo/Si multilayers,” Opt. Eng. 41, 1797–1804 (2002). [CrossRef]
  3. S. Braun, T. Foltyn, L. van Loyen, M. Moss, and A. Leson, “Multi component EUV multilayer mirrors,” Proc. SPIE 5037, 274–285 (2003). [CrossRef]
  4. R. Stuik, E. Louis, A. E. Yakshin, P. C. Görts, E. L. G. Maas, F. Bijkerk, D. Schmitz, F. Scholze, G. Ulm, and M. Haidl, “Peak and integrated reflectivity, wavelength and gamma optimization of Mo/Si, and Mo/Be multilayer, multielement optics for extreme ultraviolet lithography,” J. Vac. Sci. Technol. B 17, 2998–3002 (1999). [CrossRef]
  5. E. Louis, A. E. Yakshin, T. Tsarfati, and F. Bijkerk, “Nanometer interface and materials control for multilayer EUV-optical applications,” Prog. Surf. Sci. 86, 255–294 (2011). [CrossRef]
  6. I. A. Makhotkin, E. Zoethout, E. Louis, A. M. Yakunin, S. Müllender, and F. Bijkerk, “Wavelength selection for multilayer coatings for lithography generation beyond extreme ultraviolet,” J. Micro/Nanolithogr. MEMS MOEMS 11, 040501 (2012). [CrossRef]
  7. V. Ayvazyan, A. Brandt, S. Choroba, G. Petrosyan, K. Rehlich, S. N. Simrock, and P. Vetrov, “Digital RF control system for the DESY FLASH linear accelerator,” in EUROCON 2007—The International Conference on Computer as a Tool, 4400385 (2007), pp. 1178–1185.
  8. W. Ackermann, G. Asova, V. Ayvazyan, A. Azima, N. Baboi, J. Bähr, V. Balandin, B. Beutner, A. Brandt, A. Bolzmann, R. Brinkmann, O. I. Brovko, M. Castellano, P. Castro, L. Catani, E. Chiadroni, S. Choroba, A. Cianchi, J. T. Costello, D. Cubaynes, J. Dardis, W. Decking, H. Delsim-Hashemi, A. Delserieys, G. Di Pirro, M. Dohlus, S. Düsterer, A. Eckhardt, H. T. Edwards, B. Faatz, J. Feldhaus, K. Flöttmann, J. Frisch, L. Fröhlich, T. Garvey, U. Gensch, Ch. Gerth, M. Görler, N. Golubeva, H. J. Grabosch, M. Grecki, O. Grimm, K. Hacker, U. Hahn, J. H. Han, K. Honkavaara, T. Hott, M. Hüning, Y. Ivanisenko, E. Jaeschke, W. Jalmuzna, T. Jezynski, R. Kammering, V. Katalev, K. Kavanagh, E. T. Kennedy, S. Khodyachykh, K. Klose, V. Kocharyan, M. Körfer, M. Kollewe, W. Koprek, S. Korepanov, D. Kostin, M. Krassilnikov, G. Kube, M. Kuhlmann, C. L. S. Lewis, L. Lilje, T. Limberg, D. Lipka, F. Löhl, H. Luna, M. Luong, M. Martins, M. Meyer, P. Michelato, V. Miltchev, W.-D. Möller, L. Monaco, W. F. O. Müller, O. Napieralski, O. Napoly, P. Nicolosi, D. Nölle, T. Nuñez, A. Oppelt, C. Pagani, R. Paparella, N. Pchalek, J. Pedregosa-Gutierrez, B. Petersen, B. Petrosyan, G. Petrosyan, L. Petrosyan, J. Pflüger, E. Plönjes, L. Poletto, K. Pozniak, E. Prat, D. Proch, P. Pucyk, P. Radcliffe, H. Redlin, K. Rehlich, M. Richter, M. Roehrs, J. Roensch, R. Romaniuk, M. Ross, J. Rossbach, V. Rybnikov, M. Sachwitz, E. L. Saldin, W. Sandner, H. Schlarb, B. Schmidt, M. Schmitz, P. Schmüser, J. R. Schneider, E. A. Schneidmiller, S. Schnepp, S. Schreiber, M. Seidel, D. Sertore, A. V. Shabunov, C. Simon, S. Simrock, E. Sombrowski, A. A. Sorokin, P. Spanknebel, R. Spesyvtsev, L. Staykov, B. Steffen, F. Stephan, F. Stulle, H. Thom, K. Tiedtke, M. Tischer, S. Toleikis, R. Treusch, D. Trines, I. Tsakov, E. Vogel, T. Weiland, H. Weise, M. Wellhöfer, M. Wendt, I. Will, A. Winter, K. Wittenburg, W. Wurth, P. Yeates, M. V. Yurkov, I. Zagorodnov, and K. Zapfe, “Operation of a free-electron laser from the extreme ultraviolet to the water window,” Nat. Photonics 1, 336–342 (2007). [CrossRef]
  9. B. Faatz, N. Baboi, V. Ayvazyan, V. Balandin, W. Decking, S. Duesterer, H.-J. Eckoldt, J. Feldhaus, N. Golubeva, K. Honkavaara, M. Koerfer, T. Laarmann, A. Leuschner, L. Lilje, T. Limberg, D. Noelle, F. Obier, A. Petrov, E. Ploenjes, K. Rehlich, H. Schlarb, B. Schmidt, M. Schmitz, S. Schreiber, H. Schulte-Schrepping, J. Spengler, M. Staack, F. Tavella, K. Tiedtke, M. Tischer, R. Treusch, M. Vogt, A. Willner, J. Bahrdt, R. Follath, M. Gensch, K. Holldack, A. Meseck, R. Mitzner, M. Drescher, V. Miltchev, J. Rönsch-Schulenburg, and J. Rossbach, “Flash II: perspectives and challenges,” Nucl. Instrum. Methods Phys. Res., Sect. A 635, S2–S6 (2011). [CrossRef]
  10. H. M. Hertz, L. Rymell, M. Berglund, G. A. Johansson, T. Wilhem, Y. Platonov, and D. Broadway, “Normal-incidence condenser mirror arrangement for compact water-window x-ray microscopy,” Proc. SPIE 3766, 247–251 (1999). [CrossRef]
  11. H. Legall, G. Blobel, H. Stiel, W. Sandner, C. Seim, P. Takman, D. H. Martz, M. Selin, U. Vogt, H. M. Hertz, D. Esser, H. Sipma, J. Luttmann, M. Höfer, H. D. Hoffmann, S. Yulin, T. Feigl, S. Rehbein, P. Guttmann, G. Schneider, U. Wiesemann, M. Wirtz, and W. Diete, “Compact x-ray microscope for the water window based on a high brightness laser plasma source,” Opt. Express 20, 18362–18369 (2012). [CrossRef]
  12. S. Di Fonzo, B. R. Müller, W. Jark, A. Gaupp, F. Schäfers, and J. H. Underwood, “Multilayer transmission phase shifters for the carbon K edge and the water window,” Rev. Sci. Instrum. 66, 1513–1516 (1995). [CrossRef]
  13. F. Schäfers, H. Mertins, A. Gaupp, W. Gudat, M. Mertin, I. Packe, F. Schmolla, S. Di Fonzo, G. Soullié, W. Jark, R. Walker, X. Le Cann, R. Nyholm, and M. Eriksson, “Soft-x-ray polarimeter with multilayer optics: complete analysis of the polarization state of light,” Appl. Opt. 38, 4074–4088 (1999). [CrossRef]
  14. N. N. Salashchenko and E. A. Shamov, “Short-period x-ray multilayers based on Cr/Sc,” Opt. Commun. 134, 7–10 (1997). [CrossRef]
  15. F. Schäfers, H. Mertins, F. Schmolla, I. Packe, N. N. Salashchenko, and E. A. Shamov, “Cr/Sc multilayers for the soft-x-ray range,” Appl. Opt. 37, 719–728 (1998). [CrossRef]
  16. J. Birch, F. Eriksson, G. A. Johansson, and H. M. Hertz, “Recent advances in ion-assisted growth of Cr/Sc multilayer x-ray mirrors for the water window,” Vacuum 68, 275–282 (2002). [CrossRef]
  17. F. Eriksson, G. A. Johansson, H. M. Hertz, E. M. Gullikson, U. Kreissig, and J. Birch, “14.5% near-normal incidence reflectance of Cr Sc x-ray multilayer mirrors for the water window,” Opt. Lett. 28, 2494–2496 (2003). [CrossRef]
  18. N. Ghafoor, F. Eriksson, E. Gullikson, L. Hultman, and J. Birch, “Incorporation of nitrogen in Cr/Sc multilayers giving improved soft x-ray reflectivity,” Appl. Phys. Lett. 92, 091913 (2008). [CrossRef]
  19. E. M. Gullikson, F. Salmassi, A. Aquila, and F. Dollar, “Progress in short period multilayer coatings for water window applications,” presented at The 8th International Conference on the Physics of X-Ray Multilayer Structures, Japan, 12–16 March2006.
  20. H. N. Chapman, A. Barty, M. Bogan, S. Boutet, M. Frank, S. P. Hau-Riege, S. Marchesini, B. Woods, S. Bajt, R. A. London, E. Plönjes-Palm, M. Kuhlmann, R. Treusch, S. Düsterer, T. Tschentscher, J. Schneider, E. Spiller, T. Möller, C. Bostedt, M. Hoener, D. Shapiro, K. Hodgson, D. van der Spoel, F. Burmeister, M. Bergh, C. Caleman, G. Huldt, M. Seibert, F. Maia, R. W. Lee, A. Szöke, N. Timneanu, and J. Hajdu, “Femtosecond diffractive imaging with a soft-X-ray free-electron laser,” Nat. Phys. 2, 839–843 (2006). [CrossRef]
  21. M. M. Seibert, T. Ekeberg, F. R. N. C. Maia, M. Svenda, J. Andreasson, O. Jönsson, D. Odić, B. Iwan, A. Rocker, D. Westphal, M. Hantke, D. P. DePonte, A. Barty, J. Schulz, L. Gumprecht, N. Coppola, A. Aquila, M. Liang, T. A. White, A. Martin, C. Caleman, S. Stern, C. Abergel, V. Seltzer, J.-M. Claverie, C. Bostedt, J. D. Bozek, S. Boutet, A. A. Miahnahri, M. Messerschmidt, J. Krzywinski, G. Williams, K. O. Hodgson, M. J. Bogan, C. Y. Hampton, R. G. Sierra, D. Starodub, I. Andersson, S. Bajt, M. Barthelmess, J. C. H. Spence, P. Fromme, U. Weierstall, R. Kirian, M. Hunter, R. B. Doak, S. Marchesini, S. P. Hau-Riege, M. Frank, R. L. Shoeman, L. Lomb, S. W. Epp, R. Hartmann, D. Rolles, A. Rudenko, C. Schmidt, L. Foucar, N. Kimmel, P. Holl, B. Rudek, B. Erk, A. Hömke, C. Reich, D. Pietschner, G. Weidenspointner, L. Strüder, G. Hauser, H. Gorke, J. Ullrich, I. Schlichting, S. Herrmann, G. Schaller, F. Schopper, H. Soltau, K.-U. Kühnel, R. Andritschke, C.-D. Schröter, F. Krasniqi, M. Bott, S. Schorb, D. Rupp, M. Adolph, T. Gorkhover, H. Hirsemann, G. Potdevin, H. Graafsma, B. Nilsson, H. N. Chapman, and J. Hajdu, “Single mimivirus particles intercepted and imaged with an x-ray laser,” Nature 470, 78–81 (2011). [CrossRef]
  22. D. P. DePonte, U. Weierstall, K. Schmidt, J. Warner, D. Starodub, J. C. H. Spence, and R. B. Doak, “Gas dynamic virtual nozzle for generation of microscopic droplet streams,” J. Phys. D 41, 195505 (2008). [CrossRef]
  23. A. J. Nelson, S. Toleikis, H. Chapman, S. Bajt, J. Krzywinski, J. Chalupsky, L. Juha, J. Cihelka, V. Hajkova, L. Vysin, T. Burian, M. Kozlova, R. R. Fäustlin, B. Nagler, S. M. Vinko, T. Whitcher, T. Dzelzainis, O. Renner, K. Saksl, A. R. Khorsand, P. A. Heimann, R. Sobierajski, D. Klinger, M. Jurek, J. Pelka, B. Iwan, J. Andreasson, N. Timneanu, M. Fajardo, J. S. Wark, D. Riley, T. Tschentscher, J. Hajdu, and R. W. Lee, “Soft x-ray free electron laser microfocus for exploring matter under extreme conditions,” Opt. Express 17, 18271–18278 (2009). [CrossRef]
  24. S. Bajt, H. N. Chapman, A. J. Nelson, R. W. Lee, S. Toleikis, P. Mirkarimi, J. B. Alameda, S. L. Baker, H. Vollmer, R. T. Graff, A. Aquila, E. M. Gullikson, J. Meyer Ilse, E. A. Spiller, J. Krzywinski, L. Juha, J. Chalupský, V. Hájková, J. Hajdu, and T. Tschentscher, “Sub-micron focusing of a soft x-ray free electron laser beam,” Proc. SPIE 7631, 76310J (2009).
  25. M. Barthelmess and S. Bajt, “Thermal and stress studies of normal incidence Mo/B4 C multilayers for a 6.7  nm wavelength,” Appl. Opt. 50, 1610–1619 (2011). [CrossRef]
  26. S. P. Hau-Riege, H. N. Chapman, J. Krzywinski, R. Sobierajski, S. Bajt, R. A. London, M. Bergh, C. Caleman, R. Nietubyc, L. Juha, J. Kuba, E. Spiller, S. Baker, R. Bionta, K. Sokolowski-Tinten, N. Stojanovic, B. Kjornrattanawanich, E. Gullikson, E. Plvnjes, S. Toleikis, and T. Tschentscher, “Sub-nanometer-scale measurements of the interaction of ultrafast soft x-ray free-electron-laser pulses with matter,” Phys. Rev. Lett. 98, 145502 (2007). [CrossRef]
  27. A. R. Khorsand, R. Sobierajski, E. Louis, S. Bruijn, E. D. van Hattum, R. W. E. van de Kruijs, M. Jurek, D. Klinger, J. B. Pelka, L. Juha, T. Burian, J. Chalupsky, J. Cihelka, V. Hajkova, L. Vysin, U. Jastrow, N. Stojanovic, S. Toleikis, H. Wabnitz, K. Tiedtke, K. Sokolowski-Tinten, U. Shymanovich, J. Krzywinski, S. Hau-Riege, R. London, A. Gleeson, E. M. Gullikson, and F. Bijkerk, “Single shot damage mechanism of Mo/Si multilayer optics under intense pulsed XUV-exposure,” Opt. Express 18, 700–712 (2010). [CrossRef]
  28. A. F. Jankowski, C. K. Saw, C. C. Walton, J. P. Hayes, and J. Nilsen, “Boron–carbide barrier layers in scandium–silicon multilayers,” Thin Solid Films 469–470, 372–376 (2004).
  29. P. Jonnard, H. Maury, K. Le Guen, J.-M. Andre, N. Mahne, A. Giglia, S. Nannarone, and F. Bridou, “Effect of B4C diffusion barriers on the thermal stability of Sc/Si periodic multilayers,” Surf. Sci. 604, 1015–1021 (2010). [CrossRef]
  30. B. Kjornrattanawanich, D. L. Windt, and J. F. Seely, “Normal-incidence silicon-gadolinium multilayers for imaging at 63  nm wavelength,” Opt. Lett. 33, 965–967 (2008). [CrossRef]
  31. H. Takenaka and T. Kawamura, “Thermal stability of Mo/C/Si/C multilayer soft x-ray mirrors,” J. Electron Spectrosc. Relat. Phenom. 80, 381–384 (1996). [CrossRef]
  32. L. G. A. M. Alink, R. W. E. van de Kruijs, E. Louis, F. Bijkerk, and J. Verhoeven, “Improved temperature stability of Mo/Si multilayers by carbide based diffusion barriers through implantation of low energy CHx+ions,” Thin Solid Films 510, 26–31 (2006). [CrossRef]
  33. T. Leisegang, D. C. Meyer, A. A. Levin, S. Braun, and P. Paufler, “On the interplay of internal/external stress and thermal stability of Mo/Si multilayers,” Appl. Phys. A 77, 965–972 (2003). [CrossRef]
  34. T. Bottger, D. C. Meyer, P. Paufler, S. Braun, M. Moss, H. Mai, and E. Beyer, “Thermal stability of Mo/Si multilayers with boron carbide interlayers,” Thin Solid Films 444, 165–173 (2003). [CrossRef]
  35. S. Bruijn, R. W. E. van de Kruijs, A. E. Yakshin, and F. Bijkerk, “Ion assisted growth of B4C diffusion barrier layers in Mo/Si multilayered structures,” J. Appl. Phys. 111, 064303 (2012). [CrossRef]
  36. F. Eriksson, N. Ghafoor, L. Hultman, and J. Birch, “Reflectivity and structural evolution of Cr/Sc and nitrogen containing Cr/Sc multilayers during thermal annealing,” J. Appl. Phys. 104, 063516 (2008). [CrossRef]
  37. E. Majkova, Y. Chushkin, M. Jergel, S. Luby, V. Holy, I. Matko, B. Chenevier, L. Toth, T. Hatano, and M. Yamamoto, “Nanometer-scale period Sc/Cr multilayer mirrors and their thermal stability,” Thin Solid Films 497, 115–120 (2006). [CrossRef]
  38. D. L. Windt, “IMD—software for modeling the optical properties of multilayer films,” Comput. Phys. 12, 360–370 (1998). [CrossRef]
  39. R. Follath, “The versatility of collimated plane grating monochromators,” Nucl. Instrum. Methods Phys. Res., Sect. A 467–468, 418–425 (2001). [CrossRef]
  40. G. G. Stoney, “The tension of metallic films deposited by electrolysis,” Proc. R. Soc. London, Ser. A 82, 172–175 (1909). [CrossRef]
  41. Y. X. Zhao, F. Buehler, J. Sites, and I. Spain, “New metastable phases of silicon,” Solid State Commun. 59, 679–682 (1986). [CrossRef]
  42. D. Geiselman, “The metallurgy of scandium,” J. Less-Common Met. 4, 362–375 (1962). [CrossRef]
  43. R. A. Patterson, “Crystal structure of titanium and chromium,” Phys. Rev. 26, 56–59 (1925). [CrossRef]
  44. S. Bajt, D. G. Stearns, and P. A. Kearney, “Investigation of the amorphous-to-crystalline transition in Mo/Si multilayers,” J. Appl. Phys. 90, 1017–1025 (2001). [CrossRef]
  45. F. R. de Boer, R. Boom, W. C. M. Mattens, A. R. Miedema, and A. K. Niessen, Cohesion in Metals: Transition Metal Alloys (North-Holland, 1988).
  46. A. F. Leontowich, A. Aquila, F. Stellato, R. Bean, H. Fleckenstein, M. Prasciolu, M. Liang, D. P. DePonte, A. Barty, F. Wang, J. Andreasson, J. Hajdu, H. N. Chapman, and S. Bajt, “Characterizing the focus of a multilayer coated off-axis parabola for FLASH beam at λ=4.3  nm,” Proc. SPIE 877787770T (2013). [CrossRef]