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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 53, Iss. 13 — May. 1, 2014
  • pp: 2860–2865

Radius measurement by laser confocal technology

Jiamiao Yang, Lirong Qiu, Weiqian Zhao, Xin Zhang, and Xu Wang  »View Author Affiliations


Applied Optics, Vol. 53, Issue 13, pp. 2860-2865 (2014)
http://dx.doi.org/10.1364/AO.53.002860


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Abstract

A laser confocal radius measurement (LCRM) method is proposed for high-accuracy measurement of the radius of curvature (ROC). The LCRM uses the peak points of confocal response curves to identify the cat eye and confocal positions precisely. It then accurately measures the distance between these two positions to determine the ROC. The LCRM also uses conic fitting, which significantly enhances measurement accuracy by restraining the influences of environmental disturbance and system noise on the measurement results. The experimental results indicate that LCRM has a relative expanded uncertainty of less than 10 ppm for both convex and concave spheres. Thus, LCRM is a feasible method for ROC measurements with high accuracy and concise structures.

© 2014 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(180.1790) Microscopy : Confocal microscopy
(220.4840) Optical design and fabrication : Testing

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: February 18, 2014
Revised Manuscript: March 27, 2014
Manuscript Accepted: March 27, 2014
Published: April 25, 2014

Virtual Issues
Vol. 9, Iss. 7 Virtual Journal for Biomedical Optics

Citation
Jiamiao Yang, Lirong Qiu, Weiqian Zhao, Xin Zhang, and Xu Wang, "Radius measurement by laser confocal technology," Appl. Opt. 53, 2860-2865 (2014)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-53-13-2860

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