Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Pixel-based defect detection from high-NA optical projection images

Not Accessible

Your library or personal account may give you access

Abstract

The reconstruction of subwavelength defects from measured images of high-NA-projection systems is demonstrated. A structure consisting of a few small unknown defects in an otherwise known mask layout is studied. The footprint of the defect, which is the measured or simulated difference between images of masks with and without defects, is used to reconstruct the position, shape, and transmission of defects. The requirement is that the few unknown defects are sparsely located in the known mask layout. The technique relies on the cost function and an appropriate optimizer. The dependency of the reconstruction results on defect sizes and types of defects is presented. Moreover, the sensitivity of the technique to noise is investigated.

© 2014 Optical Society of America

Full Article  |  PDF Article
More Like This
Extreme ultraviolet phase defect characterization based on complex amplitudes of the aerial images

Wei Cheng, Sikun Li, Xiangzhao Wang, and Zinan Zhang
Appl. Opt. 60(17) 5208-5219 (2021)

Automated defect detection and classification for fiber-optic coil based on wavelet transform and self-adaptive GA-SVM

Ruifeng Yang, Xiaole Chen, and Chenxia Guo
Appl. Opt. 60(32) 10140-10150 (2021)

Phase defect detection of large-aperture optics with static multiplanar coherent diffraction imaging

Hongchang Wang, You Li, Zhaoyang Jiao, Junyong Zhang, Mingying Sun, and Jianqiang Zhu
Appl. Opt. 59(14) 4314-4320 (2020)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (11)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (4)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (5)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved