Abstract
We describe a novel interferometric method, based on nested Fresnel zone lenses or photon sieves, for testing and measuring the radius of curvature of precision spherical surfaces that have radii in a range between several meters and a few hundred meters. We illustrate the measurement concept with radius measurements of a spherical mirror with a radius of about 10 m. The measured radius is for a coverage factor . Our measurements also demonstrate, for the first time to the best of our knowledge, the utility of photon sieves for precision surface metrology because they diffuse higher diffraction orders of computer generated holograms, which reduces coherent noise.
Full Article | PDF ArticleMore Like This
Zhigang Li, Lirong Qiu, Weiqian Zhao, and Shuai Yang
Opt. Express 24(17) 19746-19759 (2016)
Youichi Bitou, Osamu Sato, and Souichi Telada
Opt. Express 27(10) 13664-13674 (2019)
Yongying Yang, Lei Zhang, Tu Shi, Dong Liu, Shiyao Chong, Yibing Shen, and Jian Bai
Appl. Opt. 54(10) 2838-2844 (2015)