OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 53, Iss. 22 — Aug. 1, 2014
  • pp: 4894–4902

Actinic damage of Y/Mo multilayer optics in a table-top plasma-driven x-ray laser

Davide Bleiner, Sergiy Yulin, Julia Martynczuk, Mabel Ruiz-Lopez, Yunieski Arbelo, Jürg E. Balmer, and Detlef Günther  »View Author Affiliations


Applied Optics, Vol. 53, Issue 22, pp. 4894-4902 (2014)
http://dx.doi.org/10.1364/AO.53.004894


View Full Text Article

Enhanced HTML    Acrobat PDF (1263 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

A Y/Mo multilayer coating, optimized for top reflectivity at λ=12nm, has been nano-inspected after long-term operation at the in-house soft x-ray laser. The surface and optical inspections were complemented by electron microscopy on cross sections, prepared with focused ion beam technology. A factor of 2.5 loss of reflectivity in the exposed area (ca. 30% relative loss every 100 shots), with concomitant nanoscale photodamage and particle fallout, was found. The x-ray-laser-induced damage extended as deep as 250 nm beneath the surface and as wide as the millimeter spot size.

© 2014 Optical Society of America

OCIS Codes
(140.7240) Lasers and laser optics : UV, EUV, and X-ray lasers
(240.0310) Optics at surfaces : Thin films
(240.5770) Optics at surfaces : Roughness
(340.0340) X-ray optics : X-ray optics
(340.7470) X-ray optics : X-ray mirrors
(240.1485) Optics at surfaces : Buried interfaces

ToC Category:
Optics at Surfaces

History
Original Manuscript: March 18, 2014
Revised Manuscript: June 11, 2014
Manuscript Accepted: June 12, 2014
Published: July 23, 2014

Citation
Davide Bleiner, Sergiy Yulin, Julia Martynczuk, Mabel Ruiz-Lopez, Yunieski Arbelo, Jürg E. Balmer, and Detlef Günther, "Actinic damage of Y/Mo multilayer optics in a table-top plasma-driven x-ray laser," Appl. Opt. 53, 4894-4902 (2014)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-53-22-4894

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited