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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 53, Iss. 22 — Aug. 1, 2014
  • pp: 4894–4902

Actinic damage of Y/Mo multilayer optics in a table-top plasma-driven x-ray laser

Davide Bleiner, Sergiy Yulin, Julia Martynczuk, Mabel Ruiz-Lopez, Yunieski Arbelo, Jürg E. Balmer, and Detlef Günther  »View Author Affiliations

Applied Optics, Vol. 53, Issue 22, pp. 4894-4902 (2014)

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A Y/Mo multilayer coating, optimized for top reflectivity at λ=12nm, has been nano-inspected after long-term operation at the in-house soft x-ray laser. The surface and optical inspections were complemented by electron microscopy on cross sections, prepared with focused ion beam technology. A factor of 2.5 loss of reflectivity in the exposed area (ca. 30% relative loss every 100 shots), with concomitant nanoscale photodamage and particle fallout, was found. The x-ray-laser-induced damage extended as deep as 250 nm beneath the surface and as wide as the millimeter spot size.

© 2014 Optical Society of America

OCIS Codes
(140.7240) Lasers and laser optics : UV, EUV, and X-ray lasers
(240.0310) Optics at surfaces : Thin films
(240.5770) Optics at surfaces : Roughness
(340.0340) X-ray optics : X-ray optics
(340.7470) X-ray optics : X-ray mirrors
(240.1485) Optics at surfaces : Buried interfaces

ToC Category:
Optics at Surfaces

Original Manuscript: March 18, 2014
Revised Manuscript: June 11, 2014
Manuscript Accepted: June 12, 2014
Published: July 23, 2014

Davide Bleiner, Sergiy Yulin, Julia Martynczuk, Mabel Ruiz-Lopez, Yunieski Arbelo, Jürg E. Balmer, and Detlef Günther, "Actinic damage of Y/Mo multilayer optics in a table-top plasma-driven x-ray laser," Appl. Opt. 53, 4894-4902 (2014)

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