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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 53, Iss. 24 — Aug. 20, 2014
  • pp: 5290–5293

Improving accuracy in period measurement of gratings with multiple diffraction orders

Hiroyuki Ichikawa and Tomohiro Toda  »View Author Affiliations

Applied Optics, Vol. 53, Issue 24, pp. 5290-5293 (2014)

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Determining the period of a grating generating multiple diffraction orders from the data of diffraction angle measurement is not an easy task, mainly because of positioning error. We propose a novel technique, i.e., numerically adjusting the specimen position, to solve the problem. The procedure alone would reduce the amount of uncertainty by two orders of magnitude.

© 2014 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4290) Instrumentation, measurement, and metrology : Nondestructive testing

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: May 21, 2014
Revised Manuscript: July 1, 2014
Manuscript Accepted: July 4, 2014
Published: August 12, 2014

Hiroyuki Ichikawa and Tomohiro Toda, "Improving accuracy in period measurement of gratings with multiple diffraction orders," Appl. Opt. 53, 5290-5293 (2014)

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