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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 53, Iss. 24 — Aug. 20, 2014
  • pp: 5307–5311

Microscopic lithography with pixelate diffraction of a digital micro-mirror device for micro-lens fabrication

Xiang-Yu Ding, Yu-Xuan Ren, Lei Gong, Zhao-Xiang Fang, and Rong-De Lu  »View Author Affiliations


Applied Optics, Vol. 53, Issue 24, pp. 5307-5311 (2014)
http://dx.doi.org/10.1364/AO.53.005307


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Abstract

The irradiance in microscopic lithography using a digital micro-mirror device (DMD) as a virtual digital mask generator is influenced by diffraction effects that have been exploited to fabricate microstructures. Based on the established model, the theoretical analysis and simulation of DMD diffraction characteristics has been studied. A novel method without masking to fabricate a micro-lens by pixilation of micro-mirrors inside the DMDs used in microscopic lithography has been proposed. It is a method of precise control of photon-induced curing behavior of photoresist by full use of diffraction effects and verification of the feasibility of the fabrication method based on diffraction. The introduced method provides an option for accurate and flexible micro-fabrication of microstructures.

© 2014 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(120.4610) Instrumentation, measurement, and metrology : Optical fabrication
(220.4000) Optical design and fabrication : Microstructure fabrication
(130.4815) Integrated optics : Optical switching devices
(050.6875) Diffraction and gratings : Three-dimensional fabrication

ToC Category:
Optical Design and Fabrication

History
Original Manuscript: May 21, 2014
Revised Manuscript: July 14, 2014
Manuscript Accepted: July 14, 2014
Published: August 12, 2014

Citation
Xiang-Yu Ding, Yu-Xuan Ren, Lei Gong, Zhao-Xiang Fang, and Rong-De Lu, "Microscopic lithography with pixelate diffraction of a digital micro-mirror device for micro-lens fabrication," Appl. Opt. 53, 5307-5311 (2014)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-53-24-5307

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