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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 53, Iss. 24 — Aug. 20, 2014
  • pp: 5448–5452

Balanced plane-mirror heterodyne interferometer with subnanometer periodic nonlinearity

Peng-cheng Hu, Peng Chen, Xue-mei Ding, and Jiu-bin Tan  »View Author Affiliations

Applied Optics, Vol. 53, Issue 24, pp. 5448-5452 (2014)

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A balanced plane-mirror heterodyne interferometer with a polarizing beam splitter used to recombine the reference and measurement beams is proposed to reduce periodic nonlinearity and to eliminate thermal error. Experimental results indicated that the periodic error due to ghost reflection was kept within ±36pm, and the interferometer proposed was immune from thermal error.

© 2014 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.6810) Instrumentation, measurement, and metrology : Thermal effects

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: May 9, 2014
Revised Manuscript: July 18, 2014
Manuscript Accepted: July 18, 2014
Published: August 15, 2014

Peng-cheng Hu, Peng Chen, Xue-mei Ding, and Jiu-bin Tan, "Balanced plane-mirror heterodyne interferometer with subnanometer periodic nonlinearity," Appl. Opt. 53, 5448-5452 (2014)

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