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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 53, Iss. 24 — Aug. 20, 2014
  • pp: 5510–5516

On-line surface inspection using cylindrical lens–based spectral domain low-coherence interferometry

Dawei Tang, Feng Gao, and X. Jiang  »View Author Affiliations

Applied Optics, Vol. 53, Issue 24, pp. 5510-5516 (2014)

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We present a spectral domain low-coherence interferometry (SD-LCI) method that is effective for applications in on-line surface inspection because it can obtain a surface profile in a single shot. It has an advantage over existing spectral interferometry techniques by using cylindrical lenses as the objective lenses in a Michelson interferometric configuration to enable the measurement of long profiles. Combined with a modern high-speed CCD camera, general-purpose graphics processing unit, and multicore processors computing technology, fast measurement can be achieved. By translating the tested sample during the measurement procedure, real-time surface inspection was implemented, which is proved by the large-scale 3D surface measurement in this paper. ZEMAX software is used to simulate the SD-LCI system and analyze the alignment errors. Two step height surfaces were measured, and the captured interferograms were analyzed using a fast Fourier transform algorithm. Both 2D profile results and 3D surface maps closely align with the calibrated specifications given by the manufacturer.

© 2014 Optical Society of America

OCIS Codes
(070.4790) Fourier optics and signal processing : Spectrum analysis
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4630) Instrumentation, measurement, and metrology : Optical inspection

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: May 7, 2014
Revised Manuscript: July 17, 2014
Manuscript Accepted: July 18, 2014
Published: August 18, 2014

Dawei Tang, Feng Gao, and X. Jiang, "On-line surface inspection using cylindrical lens–based spectral domain low-coherence interferometry," Appl. Opt. 53, 5510-5516 (2014)

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