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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 53, Iss. 26 — Sep. 10, 2014
  • pp: 5841–5849

Subsurface damage of fused silica lapped by fixed-abrasive diamond pellets

Zhichao Dong, Haobo Cheng, Xu Ye, and Hon-Yuen Tam  »View Author Affiliations


Applied Optics, Vol. 53, Issue 26, pp. 5841-5849 (2014)
http://dx.doi.org/10.1364/AO.53.005841


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Abstract

Minimizing subsurface damage (SSD) is in high demand for optics during grinding, lapping, and polishing. A fixed-abrasive diamond pellet (FADP) has been validated as a potential tool in fast lapping and polishing of hard optical materials. This study inspects and measures the SSD of fused silica developed in lapping and microlapping by FADPs tool through a taper polishing method, assisted with profile measurement and microexamination. A series of experiments is conducted to reveal the influence of lapping parameters on SSD depth and surface roughness, including diamond size, lapping pressure, and velocity, as well as rubber type. Results indicate that SSD depth and surface roughness are mostly sensitive to diamond size but are generally independent of lapping pressure and velocity. Softer rubber can reduce SSD depth and improve surface roughness. The ratio of SSD depth to surface roughness (peak to valley: Rt) is confirmed to be 7.4±1.3, which can predict the SSD depth of fused silica lapped by FADPs with a rapid roughness measurement.

© 2014 Optical Society of America

OCIS Codes
(220.4610) Optical design and fabrication : Optical fabrication
(220.5450) Optical design and fabrication : Polishing

ToC Category:
Optical Design and Fabrication

History
Original Manuscript: July 3, 2014
Manuscript Accepted: July 24, 2014
Published: September 2, 2014

Citation
Zhichao Dong, Haobo Cheng, Xu Ye, and Hon-Yuen Tam, "Subsurface damage of fused silica lapped by fixed-abrasive diamond pellets," Appl. Opt. 53, 5841-5849 (2014)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-53-26-5841


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References

  1. J. H. Campbell, R. A. Hawley-Fedder, and C. J. Stolz, “NIF optical materials and fabrication technologies: an overview,” Proc. SPIE 5341, 84–101 (2004). [CrossRef]
  2. M. Buijs and K. K. Houten, “Three-body abrasion of brittle materials as studied by lapping,” Wear 166, 237–245 (1993). [CrossRef]
  3. M. D. Feit and A. M. Rubenchik, “Influence of subsurface cracks on laser induced surface damage,” Proc. SPIE 5273, 264–272 (2004). [CrossRef]
  4. F. Y. Genin, A. Salleo, T. V. Pistor, and L. L. Chase, “Role of light intensification by cracks in optical breakdown on surfaces,” J. Opt. Soc. Am. 18, 2607–2616 (2001). [CrossRef]
  5. J. Neauport, C. Ambard, P. Cormont, N. Darbois, J. Destribats, C. Luitot, and O. Rondeau, “Subsurface damage measurement of ground fused silica parts by HF etching techniques,” Opt. Express 17, 20448–20456 (2009). [CrossRef]
  6. Y. Zhou, P. D. Funkenbusch, D. J. Quesnel, and D. Golini, “Effect of etching and imaging mode on the measurement of subsurface damage in microground optical glasses,” J. Am. Ceram. Soc. 77, 3277–3280 (1994). [CrossRef]
  7. T. Suratwala, L. Wong, P. Miller, M. D. Feit, J. Menapace, R. Steele, P. Davis, and D. Walmer, “Sub-surface mechanical damage distributions during grinding of fused silica,” J. Non-Cryst. Solids 352, 5601–5617 (2006). [CrossRef]
  8. T. Suratwala, R. Steele, M. D. Feit, L. Wong, P. Miller, J. Menapace, and P. Davis, “Effect of rogue particles on the sub-surface damage of fused silica during grinding/polishing,” J. Non-Cryst. Solids 354, 2023–2037 (2008). [CrossRef]
  9. J. A. Randi, J. C. Lambropoulos, and S. D. Jacobs, “Subsurface damage in some single crystalline optical materials,” Appl. Opt. 44, 2241–2249 (2005). [CrossRef]
  10. Z. Wang, Y. L. Wu, Y. F. Dai, and S. Y. Li, “Subsurface damage distribution in the lapping process,” Appl. Opt. 47, 1417–1426 (2008). [CrossRef]
  11. S. R. Arrasmith, I. A. Kozhinova, L. L. Gregg, A. B. Shorey, H. J. Romanofsky, S. D. Jacobs, D. Golini, W. I. Kordonski, S. Hogan, and P. Dumas, “Details of polishing spot in magnetorheological finishing (MRF),” Proc. SPIE 3782, 92–100 (1999). [CrossRef]
  12. J. A. Menapace, B. Penetrante, D. Golini, A. F. Slomba, P. E. Miller, T. G. Parham, M. Nichols, and J. Peterson, “Combined advanced finishing and UV-laser conditioning for producing UV damage resistant fused silica optics,” Proc. SPIE 4679, 56–68 (2001). [CrossRef]
  13. H. B. Cheng and Z. J. Feng, “Surface roughness and material-removal rate with magnetorheological finishing without subsurface damage of the surface,” J. Opt. Technol. 72, 865–871 (2005). [CrossRef]
  14. K. R. Fine, R. Garbe, T. Gip, and Q. Nguyen, “Non-destructive, real time direct measurement of subsurface damage,” Proc. SPIE 5799, 105–110 (2005). [CrossRef]
  15. M. Trost, T. Herffurth, D. Schmitz, S. Schröder, A. Duparré, and A. Tünnermann, “Evaluation of subsurface damage by light scattering techniques,” Appl. Opt. 52, 6579–6588 (2013). [CrossRef]
  16. J. Wang and R. L. Maier, “Quasi-Brewster angle technique for evaluating the quality of optical surfaces,” Proc. SPIE 5375, 1286–1294 (2004). [CrossRef]
  17. J. C. Lambropoulos, S. D. Jacobs, and J. Ruckman, “Material removal mechanisms from grinding to polishing,” Ceram. Trans. 102, 113–128 (1999).
  18. J. Neauport, J. Destribats, C. Maunier, C. Ambard, P. Cormont, B. Pintault, and O. Rondeau, “Loose abrasive slurries for optical glass lapping,” Appl. Opt. 49, 5736–5745 (2010). [CrossRef]
  19. Y. G. Li, N. Zheng, H. B. Li, J. Hou, X. Y. Lei, X. H. Chen, Z. G. Yuan, Z. Z. Guo, J. Wang, Y. B. Guo, and Q. Xu, “Morphology and distribution of subsurface damage in optical fused silica parts: bound-abrasive grinding,” Appl. Surf. Sci. 257, 2066–2073 (2011). [CrossRef]
  20. X. Tonnellier, P. Morantz, and P. Shore, “Subsurface damage in precision ground ULE and Zerodur surfaces,” Opt. Express 15, 12197–12205 (2007). [CrossRef]
  21. F. W. Preston, “Structure of abraded glass surfaces,” Trans. Opt. Soc. London 23, 141–164 (1922).
  22. F. K. Aleinikov, “The effect of certain physical and mechanical properties on the grinding of brittle materials,” Sov. Phys. Tech. Phys. 27, 2529–2538 (1957).
  23. P. P. Hed and D. F. Edwards, “Optical glass fabrication technology. 2: relationship between surface roughness and subsurface damage,” Appl. Opt. 26, 4677–4680 (1987). [CrossRef]
  24. J. C. Lambropoulos, Y. Li, P. Funkenbusch, and J. Ruckman, “Non-contact estimate of grinding subsurface damage,” Proc. SPIE 3782, 41–50 (1999). [CrossRef]
  25. J. C. Lambropoulos, “From abrasive size to subsurface damage in grinding,” in Optical Fabrication and Testing, OSA Technical Digest (2000), pp. 17–18.
  26. S. N. Shafrir, J. C. Lambropoulos, and S. D. Jacobs, “Subsurface damage and microstructure development in precision microground hard ceramics using magnetorheological finishing spots,” Appl. Opt. 46, 5500–5515 (2007). [CrossRef]
  27. P. E. Miller, T. I. Suratwala, L. L. Wong, M. D. Feit, J. A. Menapace, P. J. Davis, and R. A. Steele, “The distribution of subsurface damage in fused silica,” Proc. SPIE 5991, 599101 (2005). [CrossRef]
  28. J. B. Johnson, D. W. Kim, R. E. Parks, and J. H. Burge, “New approach for pre-polish grinding with low subsurface damage,” Proc. SPIE 8126, 81261E (2011). [CrossRef]
  29. Z. C. Dong, H. B. Cheng, and H. Y. Tam, “Investigation on removal features of multidistribution fixed abrasive diamond pellets used in the polishing of SiC mirrors,” Appl. Opt. 51, 9373–9382 (2012).
  30. Z. C. Dong, H. B. Cheng, and H. Y. Tam, “Further investigations on fixed abrasive diamond pellets used for diminishing mid-spatial frequency errors of optical mirrors,” Appl. Opt. 53, 327–334 (2014). [CrossRef]
  31. Z. C. Dong and H. B. Cheng, “Study on removal mechanism and removal characters for SiC and fused silica by fixed abrasive diamond pellets,” Int. J. Mach. Tools Manuf. 85, 1–13 (2014).
  32. Z. C. Dong, H. B. Cheng, and H. Y. Tam, “Modified subaperture tool influence functions of a flat pitch polisher with reverse-calculated material removal rate,” Appl. Opt. 53, 2455–2464 (2014). [CrossRef]
  33. H. B. Cheng, Y. Yam, and Y. T. Wang, “Experimentation on MR fluid using a 2-axis wheel tool,” J. Mater. Process. Technol. 209, 5254–5261 (2009). [CrossRef]
  34. H. B. Cheng, Z. C. Dong, X. Ye, and H. Y. Tam, “Subsurface damages of fused silica developed during deterministic small tool polishing,” Opt. Express 22, 18588–18603 (2014). [CrossRef]

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