Reliable optical characterization of e-beam evaporated TiO<sub>2</sub> films deposited at different substrate temperatures

T. Amotchkina; M. Trubetskov; A. Tikhonravov; I. B. Angelov; V. Pervak

doi:10.1364/AO.53.0000A8

Applied Optics
Vol. 53,
Issue 4,
pp. A8-A15
(2014)
•https://doi.org/10.1364/AO.53.0000A8

Reliable optical characterization of e-beam evaporated TiO₂ films deposited at different substrate temperatures

T. Amotchkina, M. Trubetskov, A. Tikhonravov, I. B. Angelov, and V. Pervak

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T. Amotchkina, M. Trubetskov, A. Tikhonravov, I. B. Angelov, and V. Pervak, "Reliable optical characterization of e-beam evaporated TiO₂ films deposited at different substrate temperatures," Appl. Opt. 53, A8-A15 (2014)

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Abstract

We studied e-beam evaporated ${TiO}_{2}$ films deposited at two different substrate temperatures between 120°C and 300°C. We reliably characterized the film samples on the basis of in situ and ex situ measurements. We carried out annealing on the samples and studied the induced changes in the properties of the films. The results can be useful for further laser-induced damage threshold investigations.

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Sample	Content	Model	Volume Fraction $p$ , %	Thickness $d$ , nm	$n$ at 500 nm	Density $ρ$ , $g / {cm}^{3}$
S1	${TiO}_{2} / Vacuum$	Cauchy		453.9	2.06	3.2
	${TiO}_{2} / Vacuum$	Bruggemann	74.1	444.7	2.1	3.2
	${TiO}_{2} / Water$	Cauchy		457.9	2.18	3.43
	${TiO}_{2} / Water$	Bruggemann	73.5	456.5	2.19	3.43
S2	${TiO}_{2} / Water$	Cauchy		457.3	2.21	3.48
S2	${TiO}_{2} / Water$	Bruggemann	74.9	458.7	2.20	3.48
S3	${TiO}_{2} / Vacuum$	Cauchy		405.2	2.28	3.6
	${TiO}_{2} / Vacuum$	Bruggemann	85.0	404.5	2.28	3.6
	${TiO}_{2} / Water$	Cauchy		408.5	2.34	3.7
	${TiO}_{2} / Water$	Bruggemann	85.0	411.3	2.33	3.7
S4	${TiO}_{2} / Water$	Cauchy		398.6	2.37	3.7
S4	${TiO}_{2} / Water$	Bruggemann	88.1	400.2	2.37	3.7

	$n$ at 500 nm		Thickness, nm		Density, $g / {cm}^{3}$		Packing Density, %
Sample	Before	After	Before	After	Before	After	Before	After
S2	2.21	2.29	456.5	445.9	3.48	3.6	74.7	81.7
S4	2.37	2.38	398.6	400.9	3.7	3.75	88.1	89.0

Sample	Content	Model	Volume Fraction $p$ , %	Thickness $d$ , nm	$n$ at 500 nm	Density $ρ$ , $g / {cm}^{3}$
S1	${TiO}_{2} / Vacuum$	Cauchy		453.9	2.06	3.2
	${TiO}_{2} / Vacuum$	Bruggemann	74.1	444.7	2.1	3.2
	${TiO}_{2} / Water$	Cauchy		457.9	2.18	3.43
	${TiO}_{2} / Water$	Bruggemann	73.5	456.5	2.19	3.43
S2	${TiO}_{2} / Water$	Cauchy		457.3	2.21	3.48
S2	${TiO}_{2} / Water$	Bruggemann	74.9	458.7	2.20	3.48
S3	${TiO}_{2} / Vacuum$	Cauchy		405.2	2.28	3.6
	${TiO}_{2} / Vacuum$	Bruggemann	85.0	404.5	2.28	3.6
	${TiO}_{2} / Water$	Cauchy		408.5	2.34	3.7
	${TiO}_{2} / Water$	Bruggemann	85.0	411.3	2.33	3.7
S4	${TiO}_{2} / Water$	Cauchy		398.6	2.37	3.7
S4	${TiO}_{2} / Water$	Bruggemann	88.1	400.2	2.37	3.7

	$n$ at 500 nm		Thickness, nm		Density, $g / {cm}^{3}$		Packing Density, %
Sample	Before	After	Before	After	Before	After	Before	After
S2	2.21	2.29	456.5	445.9	3.48	3.6	74.7	81.7
S4	2.37	2.38	398.6	400.9	3.7	3.75	88.1	89.0

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Equations (7)

Applied Optics