A new wavelength-scanning two-channel polarization modulation ellipsometer is described, where a photo-elastic modulator is used and the analyzed light is separated into orthogonally polarized beams using a Wollaston prism. Both beams are detected using phototubes whose bias voltage is dynamically controlled for constant dc. The dc from each phototube is measured with a digital voltmeter, and the fundamental and second harmonic of the phototube current are measured using individual lock-in amplifiers. All three of the associated ellipsometric parameters (N = cos2ψ, S = sin2ψ sinδ, and C = sin2ψ, cosΔ) can be determined simultaneously in a single scan. The versatility of the instrument is demonstrated by the determination of the optical functions of Si from 238 to 652 nm (5.3–1.9 eV).

© 1990 Optical Society of America

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