Two-modulator generalized ellipsometry: experiment and calibration
Applied Optics, Vol. 36, Issue 31, pp. 8184-8189 (1997)
http://dx.doi.org/10.1364/AO.36.008184
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Abstract
A two-modulator generalized ellipsometer is described that is capable of measuring all 16 elements of a sample Mueller matrix with four measurements made at different azimuthal orientations of the polarization state generator and polarization state detector. If the sample can be described with a Mueller–Jones matrix, only a single measurement is needed. Only two calibration steps are needed to determine the fundamental operating parameters of the instrument. A reflection measurement from silicon is presented as an example, which illustrates that the elements of the Mueller–Jones matrix can be measured to an accuracy of ~0.1–0.2%.
© 1997 Optical Society of America
[Optical Society of America ]
Citation
G. E. Jellison and F. A. Modine, "Two-modulator generalized ellipsometry: experiment and calibration," Appl. Opt. 36, 8184-8189 (1997)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-36-31-8184
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