Abstract
A two-modulator generalized ellipsometer is described that is capable of measuring all 16 elements of a sample Mueller matrix with four measurements made at different azimuthal orientations of the polarization state generator and polarization state detector. If the sample can be described with a Mueller–Jones matrix, only a single measurement is needed. Only two calibration steps are needed to determine the fundamental operating parameters of the instrument. A reflection measurement from silicon is presented as an example, which illustrates that the elements of the Mueller–Jones matrix can be measured to an accuracy of ∼0.1–0.2%.
© 1997 Optical Society of America
Full Article | PDF ArticleMore Like This
G. E. Jellison and F. A. Modine
Appl. Opt. 36(31) 8190-8198 (1997)
G. E. Jellison, F. A. Modine, and L. A. Boatner
Opt. Lett. 22(23) 1808-1810 (1997)
Gerald E. Jellison Jr., John D. Hunn, and Christopher M. Rouleau
Appl. Opt. 45(22) 5479-5488 (2006)