A two-modulator generalized ellipsometer is described that is capable of measuring all 16 elements of a sample Mueller matrix with four measurements made at different azimuthal orientations of the polarization state generator and polarization state detector. If the sample can be described with a Mueller–Jones matrix, only a single measurement is needed. Only two calibration steps are needed to determine the fundamental operating parameters of the instrument. A reflection measurement from silicon is presented as an example, which illustrates that the elements of the Mueller–Jones matrix can be measured to an accuracy of ∼0.1–0.2%.
© 1997 Optical Society of America
Original Manuscript: March 26, 1997
Revised Manuscript: June 12, 1997
Published: November 1, 1997
G. E. Jellison and F. A. Modine, "Two-modulator generalized ellipsometry: experiment and calibration," Appl. Opt. 36, 8184-8189 (1997)