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Applied Optics

Applied Optics


  • Vol. 36, Iss. 31 — Nov. 1, 1997
  • pp: 8184–8189

Optics InfoBase > Applied Optics > Volume 36 > Issue 31 > Two-modulator generalized ellipsometry: experiment and calibration

Two-modulator generalized ellipsometry: experiment and calibration

G. E. Jellison, Jr. and F. A. Modine  »View Author Affiliations

Applied Optics, Vol. 36, Issue 31, pp. 8184-8189 (1997)

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A two-modulator generalized ellipsometer is described that is capable of measuring all 16 elements of a sample Mueller matrix with four measurements made at different azimuthal orientations of the polarization state generator and polarization state detector. If the sample can be described with a Mueller–Jones matrix, only a single measurement is needed. Only two calibration steps are needed to determine the fundamental operating parameters of the instrument. A reflection measurement from silicon is presented as an example, which illustrates that the elements of the Mueller–Jones matrix can be measured to an accuracy of ∼0.1–0.2%.

© 1997 Optical Society of America

Original Manuscript: March 26, 1997
Revised Manuscript: June 12, 1997
Published: November 1, 1997

G. E. Jellison and F. A. Modine, "Two-modulator generalized ellipsometry: experiment and calibration," Appl. Opt. 36, 8184-8189 (1997)

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  1. G. E. Jellison, F. A. Modine, “Two-modulator generalized ellipsometry: theory,” Appl. Opt. 36, 8190–8198 (1997). [CrossRef]
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  3. G. E. Jellison, F. A. Modine, “Accurate calibration of a photoelastic modulator in a polarization modulation ellipsometry experiment,” in Polarization Considerations for Optical Systems II, R. A. Chipman, ed., Proc. Soc. Photo-Opt. Instrum. Eng.1166, 231–241 (1989).
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  7. G. E. Jellison, F. A. Modine, “Two-channel polarization modulation ellipsometer,” Appl. Opt. 29, 959–974 (1990). [CrossRef] [PubMed]

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