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Applied Optics

Applied Optics


  • Vol. 36, Iss. 31 — Nov. 1, 1997
  • pp: 8190–8198

Optics InfoBase > Applied Optics > Volume 36 > Issue 31 > Two-modulator generalized ellipsometry: theory

Two-modulator generalized ellipsometry: theory

G. E. Jellison, Jr. and F. A. Modine  »View Author Affiliations

Applied Optics, Vol. 36, Issue 31, pp. 8190-8198 (1997)

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A new ellipsometer is described that uses two photoelastic modulator–polarizer pairs, where the photoelastic modulators are operating at differing resonant frequencies. The time-dependent intensity of the light beam is extremely complicated but can be analyzed so that all elements of the sample Mueller matrix are obtained. For a given configuration, nine of the Mueller matrix elements can be measured at any one time; the other seven elements are accessible when the azimuthal angles of the photoelastic modulators are changed. The single-configuration measurement is often sufficient to characterize a number of real situations completely, such as film growth in a vacuum environment, anisotropic samples, and simple depolarization.

© 1997 Optical Society of America

Original Manuscript: March 26, 1997
Revised Manuscript: June 12, 1997
Published: November 1, 1997

G. E. Jellison and F. A. Modine, "Two-modulator generalized ellipsometry: theory," Appl. Opt. 36, 8190-8198 (1997)

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