A continuous gaseous discharge source suitable for use between 100 Å and 1000 Å is described. The source is stable, produces little or no electromagnetic interference, and is rich in high intensity lines throughout the extreme uv. The operating characteristics of this source and its spectral output with various gases are presented.
F. Paresce, S. Kumar, and C. S. Bowyer, "Continuous Discharge Line Source for the Extreme Ultraviolet," Appl. Opt. 10, 1904-1908 (1971)