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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 10, Iss. 4 — Apr. 1, 1971
  • pp: 929–934

Establishing an Optical Flatness Standard

G. Schulz, J. Schwider, C. Hiller, and B. Kicker  »View Author Affiliations


Applied Optics, Vol. 10, Issue 4, pp. 929-934 (1971)
http://dx.doi.org/10.1364/AO.10.000929


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Abstract

Methods proposed by the authors to establish a flatness standard without using a liquid mirror are proved in practice and extended. The extension is performed by a development of methods for the determination and compensation of random and systematic measuring errors by means of condition equations which must be satisfied by the measured sums of deviations from absolute planeness. Linear errors of these sums of deviations which can lead to ambiguities and errors of planeness deviations can be discovered and completely eliminated. Also nonlinear errors, for example, as a result of temperature differences or of mechanical stress, can be recognized without repeating the interference photography procedure. The deviations from absolute planeness of three fused silica plates were determined along seven diameters (angular distance 2π/14) with an accuracy of λ/500 (mean square error). This was performed by evaluating two sets of four different interference photographs, each with contour plane distances of λ/50 (from fringe to fringe).

© 1971 Optical Society of America

History
Original Manuscript: July 21, 1970
Published: April 1, 1971

Citation
G. Schulz, J. Schwider, C. Hiller, and B. Kicker, "Establishing an Optical Flatness Standard," Appl. Opt. 10, 929-934 (1971)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-10-4-929


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References

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  18. As an approximation this plane is to contain the three reference points fixed by steps 1 and 2. However, this is not exactly so, since the measured values in some of these points need not be faultless. Therefore small deviations may arise between the reference points of the steps 1 and 2 and the discussed reference plane.

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