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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 10, Iss. 5 — May. 1, 1971
  • pp: 1024–1030

Geometrically Exact Ellipsometer Alignment

D. E. Aspnes and A. A. Studna  »View Author Affiliations


Applied Optics, Vol. 10, Issue 5, pp. 1024-1030 (1971)
http://dx.doi.org/10.1364/AO.10.001024


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Abstract

A procedure is outlined in which the symmetry of the ellipsometer is used to provide the information needed for its own alignment. Alignment is based upon four null measurements taken on a transparent reflecting surface. These are related to the tilt angles of the polarizer and analyzer telescope arms, and reference angles for which the transmitted polarization vectors of the analyzer and polarizer prisms lie in the plane of incidence. The alignment is not affected by the presence of small parasitic ellipticities induced by defects in either polarizer or analyzer prisms. A step-by-step procedure for ellipsometer alignment, which requires only equipment necessary for normal operation of the instrument, is given.

© 1971 Optical Society of America

History
Original Manuscript: July 31, 1970
Published: May 1, 1971

Citation
D. E. Aspnes and A. A. Studna, "Geometrically Exact Ellipsometer Alignment," Appl. Opt. 10, 1024-1030 (1971)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-10-5-1024

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