Formulas are given for the partial derivatives of the complex index of refraction ñ with respect to the ellipsometric angles Δ and ψ, the angle of incidence φ, and the thickness of a surface film d. The formulas are very useful in a study of the propagation to ñ of systematic errors in data obtained with an ellipsometer and are easily adapted to either machine or hand calculation.
© 1971 Optical Society of America
Original Manuscript: September 21, 1970
Published: May 1, 1971
D. H. Loescher, "Formulas for the Derivatives of the Complex Index of Refraction with Respect to Δ, ψ, φ, and d," Appl. Opt. 10, 1031-1033 (1971)