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Applied Optics

Applied Optics


  • Vol. 10, Iss. 5 — May. 1, 1971
  • pp: 1031–1033

Formulas for the Derivatives of the Complex Index of Refraction with Respect to Δ, ψ, φ, and d

D. H. Loescher  »View Author Affiliations

Applied Optics, Vol. 10, Issue 5, pp. 1031-1033 (1971)

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Formulas are given for the partial derivatives of the complex index of refraction ñ with respect to the ellipsometric angles Δ and ψ, the angle of incidence φ, and the thickness of a surface film d. The formulas are very useful in a study of the propagation to ñ of systematic errors in data obtained with an ellipsometer and are easily adapted to either machine or hand calculation.

© 1971 Optical Society of America

Original Manuscript: September 21, 1970
Published: May 1, 1971

D. H. Loescher, "Formulas for the Derivatives of the Complex Index of Refraction with Respect to Δ, ψ, φ, and d," Appl. Opt. 10, 1031-1033 (1971)

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  1. R. J. Archer, Manual of Ellipsometry (Gaertner Scientific Corp., Chicago).
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