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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 10, Iss. 5 — May. 1, 1971
  • pp: 1031–1033

Formulas for the Derivatives of the Complex Index of Refraction with Respect to Δ, ψ, φ, and d

D. H. Loescher  »View Author Affiliations


Applied Optics, Vol. 10, Issue 5, pp. 1031-1033 (1971)
http://dx.doi.org/10.1364/AO.10.001031


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Abstract

Formulas are given for the partial derivatives of the complex index of refraction ñ with respect to the ellipsometric angles Δ and ψ, the angle of incidence φ, and the thickness of a surface film d. The formulas are very useful in a study of the propagation to ñ of systematic errors in data obtained with an ellipsometer and are easily adapted to either machine or hand calculation.

© 1971 Optical Society of America

History
Original Manuscript: September 21, 1970
Published: May 1, 1971

Citation
D. H. Loescher, "Formulas for the Derivatives of the Complex Index of Refraction with Respect to Δ, ψ, φ, and d," Appl. Opt. 10, 1031-1033 (1971)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-10-5-1031


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References

  1. R. J. Archer, Manual of Ellipsometry (Gaertner Scientific Corp., Chicago).
  2. G. Hass, J. E. Waylonis, J. Opt. Soc. Amer. 51, 719 (1961). [CrossRef]
  3. K. H. Zaininger, A. G. Revesz, RCA Rev. 85, (1964).
  4. F. L. McCrackin, E. Passaglia, R. R. Stromberg, H. L. Steinberg, J. Res. Nat. Bur. Stand. Phys. Chem. 67A, 363 (1963).
  5. P. H. Smith, Surface Sci. 16, 34 (1969). [CrossRef]
  6. H. G. Jerrard, Surface Sci. 16, 67 (1969). [CrossRef]
  7. Ref. 1, p. 11.
  8. L. Ward, A. Nag, Brit. J. Appl. Phys. 18, 277 (1967). [CrossRef]
  9. A. Vasicek, in Ellipsometry in the Measurement of Surfaces and Thin Films, NBS Misc. Pub. 256 (U.S. GPO, Washington, D.C., 1964), p. 25.
  10. Ref. 1, p. 16.
  11. R. W. Fane, W. E. J. Neal, J. Opt. Soc. Amer. 60, 790 (1970). [CrossRef]

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