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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 11, Iss. 11 — Nov. 1, 1972
  • pp: 2460–2462

Small-Angle Diffusing Screens for Photolithographic Camera Illumination Systems

M. C. King and D. H. Berry  »View Author Affiliations


Applied Optics, Vol. 11, Issue 11, pp. 2460-2462 (1972)
http://dx.doi.org/10.1364/AO.11.002460


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Abstract

A method is described for producing transmitting screens that diffuse light into small angles. With these screens, the amount of small-angle diffusion can be controlled while light loss from large-angle scattering is kept to a minimum. The diffusers are fabricated from two glass substrates that are ground, etched, and cemented together. There is a controlled mismatch between the optical index of the cement and that of the substrates. The screens were primarily designed for photolithographic camera illumination systems that involve a tradeoff between luminance and uniformity.

© 1972 Optical Society of America

History
Original Manuscript: March 14, 1972
Published: November 1, 1972

Citation
M. C. King and D. H. Berry, "Small-Angle Diffusing Screens for Photolithographic Camera Illumination Systems," Appl. Opt. 11, 2460-2462 (1972)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-11-11-2460

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