OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 11, Iss. 6 — Jun. 1, 1972
  • pp: 1313–1316

Properties of Ion-Bombarded Fused Quartz for Integrated Optics

R. D. Standley, W. M. Gibson, and J. W. Rodgers  »View Author Affiliations


Applied Optics, Vol. 11, Issue 6, pp. 1313-1316 (1972)
http://dx.doi.org/10.1364/AO.11.001313


View Full Text Article

Enhanced HTML    Acrobat PDF (457 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Development of techniques for production of carefully controlled, low-loss optical waveguides in solid dielectric materials is essential to development of integrated optical circuits for signal processing in future optical communications systems. Ion implantation offers an attractive possibility because of the refractive index and film thickness control possible by this technique. To evaluate this possibility we have investigated some of the optical properties of ion-bombarded fused quartz. A variety of ions ranging from helium ions to bismuth ions has been used. We have concentrated on refractive index and optical loss variations (on those implants into which a beam could be launched) as effected by (1) ion species and dose, (2) surface preparation, (3) surface temperature during bombardment, and (4) postbombardment annealing. This paper does not attempt to give an inclusive account of all the results obtained but principally discusses the best results so far, which are those using lithium ions. For lithium ion bombardment we have observed approximately linear variation of refractive index at 6328 Å with dose n = n0 + 2.1 × 10−21C, where n0 is the prebombardment value (= 1.458 for fused quartz), and C is the ion concentration in ions/cm3 (C < 2.2 × 1019). The optical absorption decreases significantly with increase in substrate temperature during implantation, and losses less than 0.2 dB/cm have been achieved. The refractive index change appears to be primarily due to disorder produced by the incident particles rather than a chemical doping effect as evidenced by postbombardment annealing studies.

© 1972 Optical Society of America

History
Original Manuscript: November 1, 1971
Published: June 1, 1972

Citation
R. D. Standley, W. M. Gibson, and J. W. Rodgers, "Properties of Ion-Bombarded Fused Quartz for Integrated Optics," Appl. Opt. 11, 1313-1316 (1972)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-11-6-1313


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. S. E. Miller, Bell Syst. Tech. J. 48, 2059 (1969).
  2. J. E. Goell, R. D. Standley, Proc. IEEE 58, 1504 (1970). [CrossRef]
  3. E. R. Schineller, R. Flam, D. Wilmot, J. Opt. Soc. Am. 58, 1171 (1968). [CrossRef]
  4. D. Grey, Ed., American Institute of Physics Handbook (McGraw-Hill, New York; 1963, pp. 8–20.
  5. R. M. Allen, Electron. Lett. 5, 111 (1969). [CrossRef]
  6. F. A. Abeles, in Advanced Optical Techniques (Wiley, New York, 1967), p. 143.
  7. O. S. Heavens, Optical Properties of Thin Solid Films (Academic, New York, 1955).
  8. M. W. Thompson, in Proc. European Conference on Ion Implantation (P. Peregrinus Ltd., Stevenage, Herts, England, 1970), p. 109.
  9. A. R. Tynes, A. D. Pearson, D. L. Bisbee, J. Opt. Soc. Am. 61, 143 (1971). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

Figures

Fig. 1 Fig. 2 Fig. 3
 

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited