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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 11, Iss. 9 — Sep. 1, 1972
  • pp: 1907–1915

White-Light Interferometric Thickness Gauge

P. A. Flournoy, R. W. McClure, and G. Wyntjes  »View Author Affiliations


Applied Optics, Vol. 11, Issue 9, pp. 1907-1915 (1972)
http://dx.doi.org/10.1364/AO.11.001907


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Abstract

A white-light interferometric thickness gauge has been developed that provides microinch sensitivity to gauge variations in moving transparent films. The new gauge that is suitable for on-line use can be adapted to monitor continuously the thickness profile of transparent films, the thickness of transparent coatings, and the birefringence of optically anisotropic materials. Its performance is relatively insensitive to variations in chemical composition, film temperature, haze level, and measurement geometry.

© 1972 Optical Society of America

History
Original Manuscript: April 12, 1972
Published: September 1, 1972

Citation
P. A. Flournoy, R. W. McClure, and G. Wyntjes, "White-Light Interferometric Thickness Gauge," Appl. Opt. 11, 1907-1915 (1972)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-11-9-1907

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