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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 12, Iss. 4 — Apr. 1, 1973
  • pp: 729–736

Electron-Resist Fabrication of Bends and Couplers for Integrated Optical Circuits

J. E. Goell  »View Author Affiliations


Applied Optics, Vol. 12, Issue 4, pp. 729-736 (1973)
http://dx.doi.org/10.1364/AO.12.000729


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Abstract

The fabrication of complex integrated optical circuits using thin films will require dielectric patterns of high resolution and edge smoothness. This paper describes an electron-beam technique that has been used to form a curved thin-film light guide and a directional coupler, and is applicable to filters and other more complex components.

© 1973 Optical Society of America

History
Original Manuscript: September 27, 1972
Published: April 1, 1973

Citation
J. E. Goell, "Electron-Resist Fabrication of Bends and Couplers for Integrated Optical Circuits," Appl. Opt. 12, 729-736 (1973)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-12-4-729

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