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Applied Optics

Applied Optics


  • Vol. 12, Iss. 4 — Apr. 1, 1973
  • pp: 737–742

Barium Silicate Films for Integrated Optical Circuits

J. E. Goell  »View Author Affiliations

Applied Optics, Vol. 12, Issue 4, pp. 737-742 (1973)

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This paper describes the preparation and properties of rf sputtered barium silicate films that are suitable for use as transmission media in integrated optical circuits. It is shown that the films, which can be produced with a wide range of refractive indices by suitable selection of the ratio of the target constituents, exhibit low optical attenuation. The techniques used to deposit the films and the effect on loss of a number of parameters including pressure, film thickness, and substrate bias are discussed.

© 1973 Optical Society of America

Original Manuscript: September 27, 1972
Published: April 1, 1973

J. E. Goell, "Barium Silicate Films for Integrated Optical Circuits," Appl. Opt. 12, 737-742 (1973)

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