OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 12, Iss. 4 — Apr. 1, 1973
  • pp: 737–742

Barium Silicate Films for Integrated Optical Circuits

J. E. Goell  »View Author Affiliations


Applied Optics, Vol. 12, Issue 4, pp. 737-742 (1973)
http://dx.doi.org/10.1364/AO.12.000737


View Full Text Article

Enhanced HTML    Acrobat PDF (1051 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

This paper describes the preparation and properties of rf sputtered barium silicate films that are suitable for use as transmission media in integrated optical circuits. It is shown that the films, which can be produced with a wide range of refractive indices by suitable selection of the ratio of the target constituents, exhibit low optical attenuation. The techniques used to deposit the films and the effect on loss of a number of parameters including pressure, film thickness, and substrate bias are discussed.

© 1973 Optical Society of America

History
Original Manuscript: September 27, 1972
Published: April 1, 1973

Citation
J. E. Goell, "Barium Silicate Films for Integrated Optical Circuits," Appl. Opt. 12, 737-742 (1973)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-12-4-737


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. S. E. Miller, Bell Syst. Tech. J. 48, 2059 (1969).
  2. J. E. Goell, R. D. Standley, Proc. IEEE 58, 1504 (1970). [CrossRef]
  3. J. L. Vossen, J. J. O’Neill, RCA Rev. 29, 149 (1968).
  4. J. L. Vossen, J. Vac. Sci. Technol. 8, S12 (1971). [CrossRef]
  5. J. E. Goell, R. D. Standley, Bell Syst. Tech. J. 48, 3445 (1969).
  6. P. D. Davidse, L. I. Maissel, J. Vac. Sci. Technol. 4, 33 (1967). [CrossRef]
  7. E. A. J. Marcatili, Bell Syst. Tech. J. 48, 2103 (1969).
  8. E. A. J. Marcatili, Bell Syst. Tech. J. 48, 2071 (1969).
  9. E. Gillam, J. Phys. Chem. Solids 11, 55 (1959). [CrossRef]
  10. T. Nishimura, Y. Murayana, K. Dota, H. Matsumaru, “Deposition of Insulating Films for Multi-Layer Interconnected Substrates by RF Sputtering of Cornings 7059 Glass,” in Digest of the Third Symposium on the Deposition of Thin Films by Sputtering (Bendix Corp., Rochester, 1969), pp. 96–106.
  11. G. V. Jorgenson, G. K. Wehner, J. Appl. Phys. 36, 2672 (1965). [CrossRef]
  12. J. L. Vossen, J. Vac. Sci. Technol. 8, 751 (1971). [CrossRef]
  13. T. W. Hickmott, Appl. Phy. Lett. 15, 232 (1969). [CrossRef]
  14. T. W. Hickmott, J. Appl. Phys. 42, 2543 (1971). [CrossRef]
  15. L. I. Maissel, R. E. Jones, C. L. Standley, IBM J. Res. Dev. 14, 176 (1970). [CrossRef]
  16. J. L. Vossen, J. J. O’Neill, RCA Rev. 24, 566 (1968).
  17. D. F. Nelson, J. McKenna, J. Appl. Phys. 38, 4057 (1957). [CrossRef]
  18. D. Marcuse, Bell Syst. Tech. J. 48, 3187 (1969).
  19. W. D. Kingery, Introduction to Ceramics (Wiley, New York, 1960), pp. 72–3.
  20. W. Kern, D. A. Puotinen, RCA Rev. 31, 187 (1970).
  21. F. A. Abeles, “Optics of Thin Films,” Advanced Optical Techniques, A. C. S. Van Heel; Ed. (Wiley, New York, 1967). pp. 143–148.
  22. P. Escola, Am. J. Sci. 4, 331 (1922). [CrossRef]
  23. J. E. Goell, Appl. Opt. 12, 729 (1973). [CrossRef] [PubMed]
  24. P. K. Tien, R. Ulrich, R. J. Martin, Appl. Phys. Letters, 14, 291 (1969). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited