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Applied Optics

Applied Optics


  • Vol. 12, Iss. 7 — Jul. 1, 1973
  • pp: 1698–1702

Properties and Fabrication of Micro Fresnel Zone Plates

Arthur H. Firester  »View Author Affiliations

Applied Optics, Vol. 12, Issue 7, pp. 1698-1702 (1973)

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Arrays of ~2-mm diam, f/9, diffraction-limited Fresnel zone plates are made and measured. Amplitude zone plates are fabricated by conventional photolithographic techniques, while a specially developed evaporation/etching technique is used for phase zone plates. The point spread function of such zone plates is measured with a rotating cube scanner and found to agree closely with theory over more than one order of magnitude.

© 1973 Optical Society of America

Original Manuscript: January 11, 1973
Published: July 1, 1973

Arthur H. Firester, "Properties and Fabrication of Micro Fresnel Zone Plates," Appl. Opt. 12, 1698-1702 (1973)

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