Single point diamond knives have been used to machine to microinch tolerances. This micromachining can also produce optics of high quality. Optical micromachining capabilities in terms of materials, shapes, and optical figure are discussed. Comparisons are made between micromachined mirrors and superpolished surfaces including reflectivity, absorption, scatter, roughness, autocorrelation length, and Nomarski microscopy. 10.6-µm pulsed damage data and preliminary 10.6-µm cw damage investigations are also reported. Micromachined well with superpolished samples.
T. T. Saito and L. B. Simmons, "Performance Characteristics of Single Point Diamond Machined Metal Mirrors for Infrared Laser Applications," Appl. Opt. 13, 2647-2650 (1974)