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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 13, Iss. 5 — May. 1, 1974
  • pp: 1115–1120

High Precision Alignment Procedure for an Ellipsometer

J. R. Zeidler, R. B. Kohles, and N. M. Bashara  »View Author Affiliations


Applied Optics, Vol. 13, Issue 5, pp. 1115-1120 (1974)
http://dx.doi.org/10.1364/AO.13.001115


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Abstract

Beam deviation in the polarizing elements is identified as a significant source of error in existing ellipsometer alignment procedures. A high precision alignment procedure that eliminates these errors is described. This procedure is less time consuming than previous methods, and its accuracy is comparable to the limit of resolution of the ellipsometer (typically 0.01–0.005°). A further advantage of this procedure is that it provides a precise method for the alignment of specimens and lasers with the ellipsometer.

© 1974 Optical Society of America

History
Original Manuscript: August 6, 1973
Published: May 1, 1974

Citation
J. R. Zeidler, R. B. Kohles, and N. M. Bashara, "High Precision Alignment Procedure for an Ellipsometer," Appl. Opt. 13, 1115-1120 (1974)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-13-5-1115


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References

  1. R. M. A. Azzam, N. M. Bashara, J. Opt. Soc. Am. 61, 600, 1118, 1236, 1380 (1971); J. Opt. Soc. Am. 62, 700 (1972). [CrossRef]
  2. D. E. Aspnes, J. Opt. Soc. Am. 61, 1077 (1971). [CrossRef]
  3. D. E. Aspnes, A. A. Studna, Appl. Opt. 10, 1024 (1971). [CrossRef] [PubMed]
  4. F. L. McCrackin, J. Opt. Soc. Am. 60, 57 (1970). [CrossRef]
  5. W. R. Hunter, D. H. Eaton, C. T. Sah, Surf. Sci. 20, 355 (1970). [CrossRef]
  6. M. Ghezzo, Brit. J. Appl. Phys. 2, 1483 (1969).
  7. G. Forgacs, Brit. J. Appl. Phys. 3, 1513 (1970).
  8. M. J. Dingham, M. Moskovits, Appl. Opt. 9, 1868 (1970).
  9. Some ambiguity exists in the previous literature due to the indiscriminate use of the term, alignment, to describe both the alignment of the telescope axes and the calibration of the azimuthal scales of the ellipsometer. In this paper, alignment implies the alignment of the telescope axes, and calibration implies the calibration of the azimuthal scales.
  10. F. L. McCrackin, E. Passaglia, R. R. Stromberg, H. L. Steinberg, J. Res. Nat. Bur. Stand. 67A, 363 (1963). [CrossRef]
  11. M. R. Steel, Appl. Opt. 10, 2370 (1971). [CrossRef] [PubMed]
  12. A. B. Winterbottom, Optical Studies of Metal Surfaces, The Royal Norwegian Sci. Soc. Rept. 1 (F Bruns, Trondheim, 1955).
  13. R. J. Archer, Manual of Ellipsometry (Gaertner Scientific Corp., Chicago, 1968).
  14. A. T. Fromhold, Ph.D. Dissertation, Department of Physics, Cornell University (1961).
  15. J. M. Bennett, H. E. Bennett, in Handbook of Optics, W. G. Driscoll, W. Vaughan, Eds. (McGraw-Hill, New York, to be published).
  16. Since the standard sample tables of many commercial ellipsometers do not allow an independent horizontal adjustment of the sample position, a special sample table (e.g., one with linear translation adjustments) may be necessary.
  17. A transparent slide with only one coated slide could be used, but the optical quality of the beam reflected from the back side of the coating is generally unsatisfactory due to interference between the beams reflected from the slide and the coating.
  18. If a source other than the alignment laser is to be used in the measurements, it may be advisable to align the source before the sample table is removed (see Sec. II F).
  19. W. R. Hunter, J. Opt. Soc. Am. 63, 951 (1973). [CrossRef]
  20. J. R. Zeidler, N. M. Bashara, unpublished.

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