A laser pattern generator has been developed using galvanometers for x-y beam deflection. The system can be operated in a random access mode, using optical beam position detection with digital computer control. In addition, it can be operated as a flying spot scanner in a raster type scan format using master transparency interrogation to produce simultaneously a laser machined copy of the master. In either mode, the system is characterized by high accuracy, high speed laser machining over a large field.
J. Raamot and V. J. Zaleckas, "Laser Pattern Generation Using X-Y Beam Deflection," Appl. Opt. 13, 1179-1183 (1974)