A device for detailed measurement of diffraction grating efficiencies and over-all performance in the VUV has been designed and constructed at the Naval Research Laboratory. The system employs semiautomated mechanisms to scan the face of the grating with a narrow monochromatic beam, and an efficiency map of the grating surface is produced on a strip chart recorder. Grating efficiency in the various diffracted orders and intensity of light scattered between orders may also be measured. A unique feature is the ability to determine the angle and effectiveness of grating blaze and variations in blaze under different conditions of illumination.
D. J. Michels, T. L. Mikes, and W. R. Hunter, "Optical Grating Evaluator: a Device for Detailed Measurement of Diffraction Grating Efficiencies in the Vacuum Ultraviolet," Appl. Opt. 13, 1223-1229 (1974)