OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 14, Iss. 1 — Jan. 1, 1975
  • pp: 220–228

High Precision Scanning Ellipsometer

D. E. Aspnes and A. A. Studna  »View Author Affiliations


Applied Optics, Vol. 14, Issue 1, pp. 220-228 (1975)
http://dx.doi.org/10.1364/AO.14.000220


View Full Text Article

Enhanced HTML    Acrobat PDF (1171 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

We describe the design, construction, alignment, and calibration of a photometric ellipsometer of the rotating-analyzer type. Data are obtained by digital sampling of the transmitted flux with an analog-to-digital converter, followed by Fourier transforming of the accumulated data with a dedicated minicomputer. With an operating mechanical rotation frequency of 74 Hz, a data acquisition cycle requires less than 7 msec. The intrinsic precision attainable is high because precision is limited only by shot noise or intrinsic source instabilities, even when relatively weak continuum lamps are used as light sources. Precision may be improved by accumulating the data for consecutive cycles at a fixed wavelength. The system allows complex reflectance ratios to be determined as continuous functions of wavelength from the near infrared to the near ultraviolet spectral range. Data reduction programs can be modified to calculate complex refractive index or dielectric function spectra, or film thicknesses and refractive indices, as well as the usual ellipsometric parameters tanψ, cosΔ.

© 1975 Optical Society of America

History
Original Manuscript: July 8, 1974
Published: January 1, 1975

Citation
D. E. Aspnes and A. A. Studna, "High Precision Scanning Ellipsometer," Appl. Opt. 14, 220-228 (1975)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-14-1-220

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

If you are accessing the full text through a member bundle, please use the Enhanced HTML link to gain access to the citation lists and other restricted features. Note that accessing both the PDF and HTML versions of an article will count as only one download against your account.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

If you are accessing the full text through a member bundle, please use the Enhanced HTML link to gain access to the citation lists and other restricted features. Note that accessing both the PDF and HTML versions of an article will count as only one download against your account.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

If you wish to use one of your free member downloads to view the figures, click "Enhanced HTML" above and access the figures from the article itself or from the navigation tab.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

If you are accessing the full text through a member bundle, please use the Enhanced HTML link to gain access to the citation lists and other restricted features. Note that accessing both the PDF and HTML versions of an article will count as only one download against your account.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited