The focus path of a laser beam deflected by a prismatic polygon mirror was calculated. It is shown that the larger the focal distance of the objective or the polygon radius, the closer the focus path approaches a straight scanning line. Especially in the case of small pattern scanning, a remarkably small deviation between actual focus path and straight scanning line can be achieved by suitable sizing and arrangement of the optical elements.
© 1976 Optical Society of America
Original Manuscript: April 9, 1976
Published: December 1, 1976
U. Bergmann, K. Klose, and L. Spiess, "Focus path of a laser beam deflected by a prismatic polygon mirror: its calculation and optimization," Appl. Opt. 15, 3084-3088 (1976)