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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 17, Iss. 16 — Aug. 15, 1978
  • pp: 2548–2555

Rib waveguide switches with MOS electrooptic control for monolithic integrated optics in GaAs-AlxGa1−xAs

J. C. Shelton, F. K. Reinhart, and R. A. Logan  »View Author Affiliations


Applied Optics, Vol. 17, Issue 16, pp. 2548-2555 (1978)
http://dx.doi.org/10.1364/AO.17.002548


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Abstract

Low-loss (1.4-cm−1) single-mode rib waveguides in Al x Ga1− x As heterostructures are fabricated by liquid phase epitaxy, double anodization, and photolithographic techniques. Switching of optical channels between adjacent waveguides is accomplished with directional coupler switches controlled with electrodes laid over an isolating dielectric, making a metal-oxide-semiconductor (MOS) configuration. Complete switching is achieved with <20 V applied to a stepped Δβ reversal electrode configuration. A 2 × 4 switching matrix with low-loss lateral offsets of the waveguides is demonstrated. By laying out several optical switching and guiding experiments within a 128-μm stripe, we show that independent optical circuits can be packed with adequate optical isolation using centerline separations ≈10 μm.

© 1978 Optical Society of America

History
Original Manuscript: November 21, 1977
Published: August 15, 1978

Citation
J. C. Shelton, F. K. Reinhart, and R. A. Logan, "Rib waveguide switches with MOS electrooptic control for monolithic integrated optics in GaAs-AlxGa1−xAs," Appl. Opt. 17, 2548-2555 (1978)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-17-16-2548


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References

  1. K. Tada, K. Hirose, Appl. Phys. Lett. 29, 561 (1974). [CrossRef]
  2. K. Hirose, K. Tada, H. Yanagawa, in Proceedings of the Eighth International Conference on Solid State Development (Tokyo, 1976); Jpn. J. Appl. Phys. 16, Suppl. 16-1, 311 (1977).
  3. M. Papuchon, Y. Combemale, X. Mathieu, D. B. Ostrowsky, L. Reiber, A. M. Roy, B. Sejourne, M. Werner, Appl. Phys. Lett. 27, 289 (1975). [CrossRef]
  4. R. V. Schmidt, H. Kogelnik, Appl. Phys. Lett. 28, 503 (1976). [CrossRef]
  5. J. C. Campbell, F. A. Blum, D. W. Shaw, K. C. Lawley, Appl. Phys. Lett. 27, 202 (1975). [CrossRef]
  6. F. J. Leonberger, J. P. Donnelly, C. O. Boxler, Appl. Phys. Lett. 29, 652 (1976). [CrossRef]
  7. R. V. Schmidt, L. L. Buhl, Electron. Lett. (GB) 12, 575 (1976). [CrossRef]
  8. F. Zernike, in Digest of Topical Meeting on Integrated Optics II (Optical Society of America, Washington, D.C., 1974), paper WAS-1.
  9. V. Ramaswamy, R. D. Standley, Bell Syst. Tech. J. 55, 767 (1976).
  10. J. C. Shelton, F. K. Reinhart, R. A. Logan, IEEE J. Quantum Electron. QE-13, 90D (1977); Appl. Opt. 17, 890 (1978). [PubMed]
  11. J. C. Shelton, F. K. Reinhart, R. A. Logan, IEEE Trans. Electron. Devices ED-24, 1198 (1977). [CrossRef]
  12. F. K. Reinhart, J. C. Shelton, R. A. Logan, in International Conference on Integrated and Optical Fiber Communications (IOOC), Tokyo (18–20 July 1977), postdeadline paper p. 11, p. 41.
  13. F. K. Reinhart, R. A. Logan, T. P. Lee, Appl. Phys. Lett. 24, 270 (1974). [CrossRef]
  14. F. J. Leonberger, C. O. Bozler, IEEE Trans. Electron. Devices ED-24, 1197 (1977); Appl. Phys. Lett. 31, 223 (1977). [CrossRef]
  15. B. Schwartz, F. Ermanis, M. H. Brastad, J. Electrochem. Soc. 123, 1089 (1976). [CrossRef]
  16. EBES-2, Bell Laboratories’ Electron Beam Exposure System, Mod 2. The system is raster-scanned with a 0.25-μm address unit capability.
  17. S. E. Miller, Bell Syst. Tech. J. 33, 661 (1954).
  18. L. O. Wilson, F. K. Reinhart, Bell Sys. Tech. J. 53, 717 (1974).
  19. F. K. Reinhart, W. R. Sinclair, R. A. Logan, Appl. Phys. Lett. 29, 21 (1976). [CrossRef]
  20. F. K. Reinhart, R. A. Logan, in Proceedings 5th Biennial Cornell EE Conference (Cornell U., Ithaca, N.Y., 1975), Vol. 5, p. 57.
  21. J. L. Merz, A. Y. Cho, Appl. Phys. Lett. 28, 456 (1976). [CrossRef]

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