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Profile measurement using projection of running fringes

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Abstract

A method of profile control or measurement using projected fringes is presented. The fringes are dynamically translated over the object, and the phase of the signal picked up at a selected point on the surface is used to determine the depth or the depth error of the profile at this point. The method has the advantage of being contact-free, fast, accurate, and easily automated.

© 1978 Optical Society of America

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