Comprehensive measurements in the vacuum uv range of 1200–3000 Å of efficiency, polarization, and scattering of classically ruled and photoresist gratings are reported. The results show that the art of ruling gratings for vacuum uv use has reached a high level of sophistication and that careful analysis of grating properties can lead to useful improvement of the ruling art.
© 1978 Optical Society of America
Original Manuscript: February 27, 1978
Published: October 1, 1978
George H. Mount and William G. Fastie, "Comprehensive analysis of gratings for ultraviolet space instrumentation," Appl. Opt. 17, 3108-3116 (1978)