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Applied Optics

Applied Optics


  • Vol. 17, Iss. 4 — Feb. 15, 1978
  • pp: 542–552

Wavelength-scanning polarization-modulation ellipsometry: some practical considerations

Victor M. Bermudez and Victor H. Ritz  »View Author Affiliations

Applied Optics, Vol. 17, Issue 4, pp. 542-552 (1978)

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A discussion is presented of the practical considerations involved in wavelength-scanning polarization-modulation ellipsometry. Emphasis is placed on factors affecting accuracy and precision and on the alignment of the optical elements. The system described is used to measure the optical properties of air-cleaved KC1 and of clean and tarnished Ag surfaces in ultrahigh vacuum in the 250–650-nm range.

© 1978 Optical Society of America

Original Manuscript: May 23, 1977
Published: February 15, 1978

Victor M. Bermudez and Victor H. Ritz, "Wavelength-scanning polarization-modulation ellipsometry: some practical considerations," Appl. Opt. 17, 542-552 (1978)

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  1. S. N. Jasperson, S. E. Schnatterly, Rev. Sci. Instrum. 40, 761 (1969);Rev. Sci. Instrum. 41, 152 (1970). [CrossRef]
  2. J. I. Treu, A. B. Callender, S. E. Schnatterly, Rev. Sci. Instrum. 44, 793 (1973). [CrossRef]
  3. J. I. Treu, Rev. Sci. Instrum. 45, 1464 (1974). [CrossRef]
  4. S. N. Jasperson, Ph.D. Thesis, Princeton U. (1969 (unpublished), available from University Microfilms, Ann Arbor, Mich., Order 69-3297.
  5. A. B. Callender, Ph.D. Thesis, Princeton U. (1971) (unpublished), Order 71-23346.
  6. R. E. Palmer, Ph.D. Thesis, Princeton U. (1971) (unpublished), Order 72-14162.
  7. S. N. Jasperson, S. E. Schnatterly, Phys. Rev. 188, 759 (1969). [CrossRef]
  8. R. C. O'Handley, D. K. Burge, S. N. Jasperson, E. J. Ashley, Surf. Sci. 50, 407 (1975) and references quoted therein. [CrossRef]
  9. The reader is referred to an extensive series of paper by R. M. A. Azzam, N. M. Bashara, and co-workers, J. Opt. Soc. Am. and Appl. Opt. (1970–1976).
  10. D. E. Aspnes, J. Opt. Soc. Am. 64, 639 (1974). [CrossRef]
  11. D. E. Aspnes, A. A. Studna, Appl. Opt. 14, 220 (1975). [CrossRef] [PubMed]
  12. R. C. O'Handley, J. Opt. Soc. Am. 63, 523 (1973). [CrossRef]
  13. R. M. A. Azzam, Optik 45, 209 (1976).
  14. V. M. Bermudez, Computer Phys. Commun. 13, 207 (1977).The program described in this reference treats measurement of N and S in Config. III and of C in Config. II. For the present discussion, a simple modification of the program has been made to allow analysis of N in Config. I and of S and C in Config. II. [CrossRef]
  15. R. J. King, J. Sci. Instrum. 43, 617 (1966). [CrossRef]
  16. RCA Photomultiplier Manual, Technical Series PT-61 (RCA, Harrison, N.J., 1970).
  17. R. T. Williams, private communication.
  18. G. K. Wertheim, Rev. Sci. Instrum. 46, 1414 (1975). [CrossRef]
  19. W. R. Hunter, J. Opt. Soc. Am. 63, 951 (1973). [CrossRef]
  20. C. E. Moeller, D. R. Grieser, Appl. Opt. 8, 206 (1969). [CrossRef] [PubMed]
  21. J. C. Cheng, L. A. Nafie, S. D. Allen, A. I. Braunstein, Appl. Opt. 15, 1960 (1976). [CrossRef] [PubMed]
  22. D. E. Aspnes, A. A. Studna, Rev. Sci. Instrum. 41, 966 (1970). [CrossRef]
  23. F. B. Hildebrand, Advanced Calculus for Applications (Prentice-Hall, Englewood Cliffs, N.J., 1962), p. 143.
  24. S. N. Jasperson, D. K. Burge, R. C. O'Handley, Surf. Sci. 37, 548 (1973). [CrossRef]
  25. L. G. Schulz, J. Opt. Soc. Am. 44, 357 (1954);L. G. Schulz, F. R. Tangherlini, J. Opt. Soc. Am. 44, 362 (1954). [CrossRef]
  26. R. H. Huebner, E. T. Arakawa, R. A. MacRae, R. N. Hamm, J. Opt. Soc. Am. 54, 1434 (1964). [CrossRef]
  27. D. K. Burge (Michelson Labs.,), private communication.See D. L. Decker, J. L. Stanford, J. Opt. Soc. Am. 61, 679 (1971), Abstract WD14.
  28. P. B. Johnson, R. W. Christy, Phys. Rev. B 6, 4370 (1972). [CrossRef]
  29. W. Köster, R. Stahl, Z. Metallkd. 58, 768 (1967).
  30. Z. Gyulai, Z. Phys. 46, 80 (1927). [CrossRef]

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