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Applied Optics

Applied Optics


  • Vol. 17, Iss. 4 — Feb. 15, 1978
  • pp: 553–557

Measurement of steep aspheric surfaces

Jan G. Dil, Peter F. Greve, and Wichert Mesman  »View Author Affiliations

Applied Optics, Vol. 17, Issue 4, pp. 553-557 (1978)

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A method of measuring the shape of high numerical aperture (NA <0.95), convex or concave, aspheric surfaces is described. The aspheric slope may be as large as 1200 waves/rad. The method is applied in two steps. First, a standard measurement is performed to obtain a reference surface. Second, the reproducibility of the fabrication of aspheric surfaces is tested by means of a holographic comparison method. The measuring error is smaller than 0.1 μm.

© 1978 Optical Society of America

Original Manuscript: June 25, 1977
Published: February 15, 1978

Jan G. Dil, Peter F. Greve, and Wichert Mesman, "Measurement of steep aspheric surfaces," Appl. Opt. 17, 553-557 (1978)

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