A method of measuring the shape of high numerical aperture (NA <0.95), convex or concave, aspheric surfaces is described. The aspheric slope may be as large as 1200 waves/rad. The method is applied in two steps. First, a standard measurement is performed to obtain a reference surface. Second, the reproducibility of the fabrication of aspheric surfaces is tested by means of a holographic comparison method. The measuring error is smaller than 0.1 μm.
© 1978 Optical Society of America
Jan G. Dil, Peter F. Greve, and Wichert Mesman, "Measurement Of Steep Aspheric Surfaces," Appl. Opt. 17, 553-557 (1978)